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Electrodeposition of High-T{sub c} Superconductor Material for Microsensor Fabrication
Thin films of YBa{sub 2}Cu{sub 3}O{sub 7} (YBCO) superconductor precursor were synthesized using electrodeposition. The YBCO precursor thin films were deposited on Ag foils using pulsed potential deposition conditions of 10 s at -4 V and 10 s at -1 V (vs Ag reference electrode). The post-annealed films showed zero electrical resistance at 60 K. The procedures for fabricating a high precision micro-sensor using YBCO superconductor, for measuring weak magnetic fields are outlined. The micro-sensor templates were patterned using x rays and precursor films were deposited into the features. 8 figs, 10 refs