Beam focusing characteristics of silicon microtips with an in-plane lens

Single microtips, 2 72 and 10 710 arrays of microtips surrounded by an integrated focusing ring, were fabricated and their focusing characteristics experimentally investigated. Observation of the beam on a phosphor screen shows that the focusing is very effective for single microtips and 2 72 arrays; moreover, the reduction in emitted current is much smaller than for double-gate focusing. 10 710 arrays of microtips, however, do not generate very focused beams. These results agree well with simulations. The possibility of simultaneous focusing and deflecting is also discussed, and a new structure combining the advantages of double-gate and surrounding ring focusing is suggested.Peer reviewed: YesNRC publication: Ye

Emission and focusing characteristics of volcano-structured double-gated field emitter arrays

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