Universal active metasurfaces for dynamic beam steering and reconfigurable focusing at telecommunication wavelengths

We report the design and experimental demonstration of a ‘universal’ reconfigurable metasurface, which by electrical control of individual metasurface elements, enables both dynamic beam steering and reconfigurable focusing

Universal active metasurfaces for dynamic beam steering and reconfigurable focusing at telecommunication wavelengths

We report the design and experimental demonstration of a ‘universal’ reconfigurable metasurface, which by electrical control of individual metasurface elements, enables both dynamic beam steering and reconfigurable focusing

Tunable all-dielectric metasurface for phase modulation of the reflected and transmitted light via permittivity tuning of indium tin oxide

We propose an electrically tunable metasurface, which can achieve relatively large phase modulation in both reflection and transmission modes (dual-mode operation). By integration of an ultrathin layer of indium tin oxide (ITO) as an electro-optically tunable material into a semiconductor-insulator-semiconductor (SIS) unit cell, we report an approach for active tuning of all-dielectric metasurfaces. The proposed controllable dual-mode metasurface includes an array of silicon (Si) nanodisks connected together via Si nanobars. These are placed on top of alumina and ITO layers, followed by a Si slab and a silica substrate. The required optical resonances are separately excited by Si nanobars in reflection and Si nanodisks in transmission, enabling highly confined electromagnetic fields at the ITO-alumina interface. Modulation of charge carrier concentration and refractive index in the ITO accumulation layer by varying the applied bias voltage leads to 240° of phase agility at an operating wavelength of 1696 nm for the reflected transverse electric (TE)-polarized beam and 270° of phase shift at 1563 nm for the transmitted transverse magnetic (TM)-polarized light. Independent and isolated control of the reflection and transmission modes enables distinctly different functions to be achieved for each operation mode. A rigorous coupled electrical and optical model is employed to characterize the carrier distributions in ITO and Si under applied bias and to accurately assess the voltage-dependent effects of inhomogeneous carrier profiles on the optical behavior of a unit cell

Array-Level Inverse Design of Beam Steering Active Metasurfaces

We report an array-level inverse design approach to optimize the beam steering performance of active metasurfaces, thus overcoming the limitations posed by nonideal metasurface phase and amplitude tuning. In contrast to device-level topology optimization of passive metasurfaces, the outlined system-level optimization framework relies on the electrical tunability of geometrically identical nanoantennas, enabling the design of active antenna arrays with variable spatial phase and amplitude profiles. Based on this method, we demonstrate high-directivity, continuous beam steering up to 70° for phased arrays with realistic tunable antenna designs, despite nonidealities such as strong covariation of scattered light amplitude with phase. Nonintuitive array phase and amplitude profiles further facilitate beam steering with a phase modulation range as low as 180°. Furthermore, we use the device geometries presented in this work for experimental validation of the system-level inverse design approach of active beam steering metasurfaces. The proposed method offers a framework to optimize nanophotonic structures at the array level that is potentially applicable to a wide variety of objective functions and actively tunable metasurface antenna array platforms

Array-scale inverse design of active metasurfaces

We develop an inverse design approach to optimize array architectures of reconfigurable metasurfaces and report dramatically improved beam steering performances with non-ideal antenna components. The versatility is enhanced by enabling continuous steering up to 70°

All-dielectric multiple quantum well active metasurfaces

We report a design of an all-dielectric Mie-resonant active metasurface, which exhibits a high reflectance (>45%) and a broad tunable phase shift at an operation wavelength of 1550 nm. The proposed design can be used for the realization of two-dimensional active metasurfaces

Tunable all-dielectric metasurface for phase modulation of the reflected and transmitted light via permittivity tuning of indium tin oxide

We propose an electrically tunable metasurface, which can achieve relatively large phase modulation in both reflection and transmission modes (dual-mode operation). By integration of an ultrathin layer of indium tin oxide (ITO) as an electro-optically tunable material into a semiconductor-insulator-semiconductor (SIS) unit cell, we report an approach for active tuning of all-dielectric metasurfaces. The proposed controllable dual-mode metasurface includes an array of silicon (Si) nanodisks connected together via Si nanobars. These are placed on top of alumina and ITO layers, followed by a Si slab and a silica substrate. The required optical resonances are separately excited by Si nanobars in reflection and Si nanodisks in transmission, enabling highly confined electromagnetic fields at the ITO-alumina interface. Modulation of charge carrier concentration and refractive index in the ITO accumulation layer by varying the applied bias voltage leads to 240° of phase agility at an operating wavelength of 1696 nm for the reflected transverse electric (TE)-polarized beam and 270° of phase shift at 1563 nm for the transmitted transverse magnetic (TM)-polarized light. Independent and isolated control of the reflection and transmission modes enables distinctly different functions to be achieved for each operation mode. A rigorous coupled electrical and optical model is employed to characterize the carrier distributions in ITO and Si under applied bias and to accurately assess the voltage-dependent effects of inhomogeneous carrier profiles on the optical behavior of a unit cell

Phase Modulation with Electrically Tunable Vanadium Dioxide Phase-Change Metasurfaces

We report a dynamically tunable reflectarray metasurface that continuously modulates the phase of reflected light in the near-infrared wavelength range under active electrical control of the phase transition from semiconducting to semimetallic states. We integrate a vanadium dioxide (VO_2) active layer into the dielectric gap of antenna elements in a reflectarray metasurface, which undergoes an insulator-to-metal transition upon resistive heating of the metallic patch antenna. The induced phase transition in the VO_2 film strongly perturbs the magnetic dipole resonance supported by the metasurface. By carefully controlling the volume fractions of coexisting metallic and dielectric regions of the VO_2 film, we observe a continuous shift of the phase of the reflected light, with a maximal achievable phase shift as high as 250°. We also observe a reflectance modulation of 23.5% as well as a spectral shift of the resonance position by 175 nm. The metasurface phase modulation is fairly broadband, yielding large phase shifts at multiple operation wavelengths

Dynamic beam steering with all-dielectric electro-optic III-V multiple-quantum-well metasurfaces

Tunable metasurfaces enable dynamical control of the key constitutive properties of light at a subwavelength scale. To date, electrically tunable metasurfaces at near-infrared wavelengths have been realized using free carrier modulation, and switching of thermo-optical, liquid crystal and phase change media. However, the highest performance and lowest loss discrete optoelectronic modulators exploit the electro-optic effect in multiple-quantum-well heterostructures. Here, we report an all-dielectric active metasurface based on electro-optically tunable III–V multiple-quantum-wells patterned into subwavelength elements that each supports a hybrid Mie-guided mode resonance. The quantum-confined Stark effect actively modulates this volumetric hybrid resonance, and we observe a relative reflectance modulation of 270% and a phase shift from 0° to ~70°. Additionally, we demonstrate beam steering by applying an electrical bias to each element to actively change the metasurface period, an approach that can also realize tunable metalenses, active polarizers, and flat spatial light modulators