3 research outputs found
ArF laser CVD of hydrogenated amorphous silicon: The role of buffer gases
- Author
- A. Gallagher
- A. Yamada
- A. Yoshikawa
- A.E. Delahoy
- A.E. Delahoy
- B.A. Scott
- D. B�uerle
- D. Metzger
- E. Bucher
- E.M. Tebben
- F. J. Comes
- G.G.A. Perkins
- H. Bock
- H. Fritzsche
- H. Stafast
- H. Stafast
- H. Takasaki
- H. Takei
- H. Zarnani
- I. Gianinoni
- J. Perrin
- J.M. Jasinski
- J.M. Jasinski
- J.O. Chu
- K. Kumata
- K. Takahashi
- K. Tanaka
- K.F. Roenigk
- M. Hanabusa
- M. Konagai
- M. Meunier
- M. Meunier
- M.A. Dillon
- M.J. Kushner
- N. Mutsukura
- N. Mutsukura
- P.A. Robertson
- R. Bilenchi
- R.E. Rocheleau
- R.E. Rocheleau
- S. Chiussi
- S. Nakano
- T. Inoue
- T. R. Dietrich
- T. Saitoh
- T. Taguchi
- T. Tanaka
- U. Itoh
- W.D. Allen
- W.J. Moore
- Y. Mishima
- Y. Tarui
- Y. Toyoshima
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
Atomistic Simulation of Si3N4 CVD from Dichlorosilane and NH3
- Author
- A Gonzalez-Lafont
- A Omeltchenko
- A Reyes-Serrato
- A. Lekhollm
- AA Bagatur’yants
- AA Bagatur’yants
- AA Korkin
- AD Mclean
- AY Liu
- B.G. Willis
- C Kleijn
- C Moller
- C-E Morosanu
- C-E Morosanu
- C-K Loong
- CC Battaile
- CM Wang
- D.J
- EW Schlag
- F Mota
- F. Brito Mota
- G Mills
- G Pacchioni
- G Peev
- G Reber
- G Valente
- G Zhai
- G.L. Zhao
- H Eyring
- H Rabitz
- H Simka
- H Toraya
- HNG Wadley
- IG Pitt
- J Niesmann
- JA Wendal
- JM Wittbrodt
- JW Klaus
- JW Klaus
- K Kato
- K.F. Roenigk
- KF Jensen
- KH Jack
- L Kubler
- LA Curtiss
- M-D Su
- M. Bjorkqvist
- M.E. Bachlechner
- M.T. Swihart
- M.W. Schmidt
- MD Allendorf
- ME Bachlechner
- MJ Frisch
- MT Swihart
- MT Swihart
- P Avouris
- P Vashishta
- P Yang
- PD Davides
- PJ Robinson
- R Grun
- R.L. Jenkins
- RE Weston
- RG Gilbert
- RK Kalia
- RN Katz
- RP Dickinson
- RS Rosier
- S Ishidzuka
- S Koseki
- S Koseki
- S Koseki
- S Yokoyama
- S Yokoyama
- S. Ishidzuka
- ST Rodgers
- T Sorita
- T Watanabe
- T. Ogata
- TP Merchant
- W-Y Ching
- W.Y. Lee
- WA Pliskin
- WH Press
- WY Ching
- X Wang
- XY Guo
- Y Kusakabe
- Y-N Xu
- Y. Widjaja
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- 01/01/2004
- Field of study
Chemical Vapor Deposition: A Chemical Engineering Perspective
- Author
- Adams A.C.
- Andre J.C.
- Bachern K.H.
- Ban V.S.
- Ban V.S.
- Biefeld G.C.
- Bloem J.
- Bowrey M.
- Bradshaw S.E.
- Bruce R.H.
- Bryant W.A.
- BuÜer H.S.
- Cadoret R.
- Caram H.S.
- Chang C.A.
- Charlson G.S.
- Chen I.
- Cheng C.H.
- Chin D.T.
- Cho A.Y.
- Cho A.Y.
- Chow R.
- Chu J.K.
- Chu T.L.
- Chu T.L.
- Chuang T.J.
- Claassen W.A.P.
- Claassen W.A.P.
- Claassen W.A.P.
- Claassen W.A.P.
- Claassen W.A.P.
- Coburn J.W.
- Coltrin M.E.
- Corboy J.F.
- Dapkus P.D.
- Donnelly V.M.
- Donnelly V.M.
- Doraiswam L.K.
- Duchemin M.J.P.
- Duchemin M.J.P.
- Dupuis R.D.
- Dupuis R.D.
- Eckbreth A.P.
- Eltoukhy A.H.
- Erstfeld T.E.
- Evans C.A.
- Eversteijn F.C.
- Eversteijn F.C.
- Farrow R.F.C.
- Fujii E.
- Gase K.S.
- Gau S.
- Gerlach-Meyer U.
- Gossard A.C.
- Greene J.E.
- Guing L.J.
- Haigh J.
- Hargis P.J.
- Herse S.D.
- Hess D.W.
- Hirose M.
- Hirose M.
- Hitchman M.L.
- Hitchman M.L.
- Hitchman M.L.
- Hitchman M.L.
- Ho P.
- Hollahan J.R.
- Hollan L.
- Jacko M.G.
- Jacko M.G.
- Jensen K.F.
- Jensen K.F.
- Juza J.
- Juza J.
- Kamins T.I.
- Kirwan D.J.
- Kniper A.E.T.
- Kniper A.E.T.
- Kobayashi N.
- Kushner MJ.
- Kushner MJ.
- Kuznetsov F.A.
- Lanford W.A.
- Lang D.V.
- Learn AJ.
- Lederman S.
- Leys M.R.
- Magelli F.
- Manke C.W.
- Meyerson B.S.
- Meyerson B.S.
- Meyerson B.S.
- Michaelidis M.
- Miller G.L.
- Mishima Y.
- Mizuno O.
- Mon E.
- Morabito J.M.
- Morita S.
- Morosanu C.E.
- Moss R.H.
- Newman C.G.
- Nishizawa J.
- Nishizawa J.
- Ogura M.
- Oran E.S.
- Osgood R.M.
- Ostrach S.
- Ota Y.
- Ploog K.
- Ploog K.
- Pollard R.
- Pumell J.H.
- Rand J.
- Reep D.H.
- Reinberg A.R.
- Reinberg A.R.
- Robertson R.
- Robertson R.
- Roenigk K.F.
- Rosenberger F.
- Rosner D.E.
- Roth R.M.
- Rundle P.C.
- Saito T.
- Samuelson G.M.
- Schyler D.J.
- Scott B.A.
- Sedgewick T.O.
- Shaw D.W.
- Shepherd W.H.
- Sirtl E.
- Small M.B.
- Smith W.R.
- Smits F.M.
- Sotirchos S.V.
- Spadoni G.
- Srinivasan G.R.
- Stein D.F.
- Stein HJ.
- Stringfellow G.B.
- Stringfellow G.B.
- Sugawara K.
- Sundaresan S.
- Takahashi R.
- Tang C.C.
- Tang C.C.
- Thornton J.A.
- Townsend W.G.
- Turban G.
- Turban G.
- Turban G.
- Van de Yen E.P.G.T.
- Van den Brekel C.H.J.
- Van den Brekel C.HJ.
- Vandenbuckle L.
- Vossen J.L.
- Wahl G.
- Westphal G.H.
- Publication venue
- 'Walter de Gruyter GmbH'
- Publication date
- Field of study