1 research outputs found
Etching—Applications and Trends of Dry Etching
- Author
- AJ Woytek
- BF Shelton
- BN Chapman
- C Mullins
- CB Zarowin
- CJ Mogab
- CM Osburn
- CY Ting
- D Choe
- DJ Dimaria
- DJ Ehrlich
- DJ Ehrlich
- DK Lam
- DL Flamm
- DR Young
- E Bogle-Rohwer
- EJ Egerton
- ER Lory
- GK Herb
- GS Mathad
- GS Oehrlein
- H Abe
- H Okano
- HR Koenig
- HW Lehmann
- J Keller
- JA Bondur
- JL Vossen
- JW Coburn
- K Darea
- KM Eisele
- LM Ephrath
- LM Ephrath
- LM Ephrath
- M Lacombat
- M Sekine
- ML Hill
- MY Tsai
- PD Brewer
- PD Brewer
- R Iscoff
- RG Frieser
- RH Bruce
- RH Bruce
- RL Bersin
- RN Castellano
- RS Bennett
- RTC Tsui
- S Ashok
- S Broydo
- S Matsuo
- S Rice
- S Schanfield
- S Schanfield
- S Schultheis
- SE Bernacki
- SJ Fonash
- SP Muraka
- T Hosoya
- T Watanabe
- TD Mantei
- TJ Chuang
- TP Chow
- VM Donnelly
- WD Ryden
- XC Mu
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- 01/01/1988
- Field of study
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