Региональные рудоконтролирующие структуры Урала

One of the most challenging requirements for the next generation EUV lithography is an extremely low amount of critically sized defects on mask blanks. Fast and reliable inspection of mask blanks is still a challenge. Here we present the current status of the development of our actinic Schwarzschild objective based microscope operating in dark field with EUV discharge produced plasma source. For characterization of the microscope performance, several programmed defect structures - artificial pits and bumps were created on top of multilayer mirror (ML) surfaces and investigated both with EUV microscope and atomic force microscope (AFM). Defect size sensitivity of actinic inspection in dark field mode without resolving the defects is under study. The dependency between defect shape, size and position in relation to the ML surface and its scattering signal will be discussed. Furthermore, first results of a defect mapping algorithm are presented

Особенности аппаратной реализации алгоритмов вычисления контрольной суммы CRC32

Приведено описание аппаратных реализаций матричного и табличного алгоритмов вычисления контрольной суммы CRC32 на ПЛИС Cyclone фирмы Altera макета SDK-6.1. Показаны особенности аппаратной реализации на примере описания блоков вычисления CRC32 и работоспособность спроектированных устройств на конкретных примерах

Spatial and temporal distribution of sperm whales (Physeter macrocephalus) within the Kaikoura submarine canyon in relation to oceanographic variables

The Kaikoura area is a valuable feeding spot for sperm whales with the presence of a submarine canyon close to shore. Male sperm whales can be found there year around, close to the shore and exhibiting almost constant foraging activities. This thesis investigates the distribution and habitat use, both spatially and temporally, of sperm whales (Physeter macrocephalus) within the Kaikoura submarine canyon, New Zealand. The primary aim was to determine which oceanographic variables and bathymetric features influence the sperm whale distribution patterns off Kaikoura. A theodolite was used to track surfacing and movement of sperm whales from a shore-based station. The accuracy of positions recorded by the theodolite was investigated by comparing theodolite measurements of an object of known position. A calibration technique was then developed as the vertical angle was not accurately determined by the theodolite. In addition to investigating the distribution of sperm whales, the daily abundance of sperm whales within the Kaikoura submarine canyon was estimated. Distance sampling and mark-resight models showed an average of 4 (SEM = 0.13) individuals present in the study area at any given time. The mark-resight technique using photo-identification was not possible from a shore-based station so a spatio-temporal model was built in order to track the identity of individuals. The model was tested using photo-identification of sperm whales collected from a boat-based station. Results showed that 88% of the modeled identifications corresponded to the photo-identification database. Sperm whales off Kaikoura were strongly associated with depth, slope and distance from the nearest coast. They were found in waters between 500 m to 1250 m deep and preferred shallower waters in winter. In spring, sperm whales occurred further from the coast, mainly in the Hikurangi Trough, north-east of the shore-based station. Generalized Additive Models (GAM) were used to identify significant oceanographic variables predicting the presence of sperm whales off Kaikoura. Models indicated that sea surface temperature (SST), chlorophylla (Chla) and distance from sea surface temperature fronts were all important parameters in predicting sperm whales presence. Results showed that sperm whales aggregated in the section of the study area with the lowest SST and near SST fronts. This study provides a detailed insight into the use of the Kaikoura submarine canyon by male sperm whales

Table-top EUV scatterometer MARYS with high-brightness discharge plasma source

Tabletop extreme ultraviolet (EUV) scatterometer MARYS has been brought into operation in 2015. Reported here are the first results of grazing incidence EUV scattering experiments on periodic rough surfaces utilizing a high-brightness DPP source FS-5420 with pulse frequency up to 1500 Hz and EUV pulse energy up to 14 mJ into 2π steradian (13.5 nm, 2% bw). High sensitivity of EUV scatterometry allowed to record up to 15 diffraction orders at grazing reflection from a test gold coated holographic reflecting grating. From recorded scattering patterns it is possible to extract information on surface roughness and parameters of periodic structures with high precision

Математическое моделирование тепломассопереноса в изоляции трубопроводов тепловых сетей, эксплуатируемых в условиях затопления

The spectral range of extreme ultraviolet radiation (XUV or EUV) is an active area of research incorporating many scientific fields such as microscopy, lithography or reflectometry. During the last decade, a lot of effort has been put into transferring many of the known techniques developed at linear accelerators into the laboratory using discharge-produced plasmas (DPPs) or laser-produced plasmas (LPPs) as an alternative light source. In particular, the semiconductor industry is in need of on-site tools in the shorter wavelength range for production and inspection of structured surfaces with nanometer resolution. Here traditional charge coupled device (CCD) image sensors are inapplicable as detectors because of the strong absorption of XUV by matter prohibiting any generation of electron-hole pairs inside a deep lying p-n junction. As a solution, two-dimensional backthinned CCDs are available in the market offering high sensitivity to XUV light. Although for many applications a one-dimensional line scanning image sensor would be sufficient, they are non-existent for XUV. It is only lately that manufacturers have started to adopt the principle of backthinning to CCD line sensors to enhance sensitivity in the long wavelength UV range (>200 nm). Here we show that generally these compact sensors offer good quantum efficiencies in the XUV which make them a candidate for many spectroscopic applications and future industrial inline inspection tools for which costly two-dimensional CCDs are oversized. We have successfully implemented a compact sensor device into a laboratory XUV spectrometer and reflectometer. Our measurements compare the quantum efficiency of a state-of-the-art XUV array CCD to a phosphor-coated line sensor and a new backthinned line sensor. Additionally, we show recorded spectra from a laboratory DPP source to demonstrate the potential of a wide range of applications

A phase retrieval algorithm based on three-dimensionally translated diffraction patterns55 S.)

An iterative phase retrieval method is proposed that combines alternating projections and registration of three-dimensionally translated near-field diffraction patterns. This method allows to enhance resolution limited by a finite detector size and automatically stitches the assembled data while avoiding the need for a priori knowledge or scanning of the object as encountered in coherent diffraction imaging or ptychography