Steering effects on growth instability during step-flow growth of Cu on Cu(1,1,17)

Kinetic Monte Carlo simulation in conjunction with molecular dynamics simulation is utilized to study the effect of the steered deposition on the growth of Cu on Cu(1,1,17). It is found that the deposition flux becomes inhomogeneous in step train direction and the inhomogeneity depends on the deposition angle, when the deposition is made along that direction. Steering effect is found to always increase the growth instability, with respect to the case of homogeneous deposition. Further, the growth instability depends on the deposition angle and direction, showing minimum at a certain deposition angle off-normal to (001) terrace, and shows a strong correlation with the inhomogeneous deposition flux. The increase of the growth instability is ascribed to the strengthened step Erlich Schwoebel barrier effects that is caused by the enhanced deposition flux near descending step edge due to the steering effect.Comment: 5 page

Effects of deposition dynamics on epitaxial growth

The dynamic effects, such as the steering and the screening effects during deposition, on an epitaxial growth (Cu/Cu(001)), is studied by kinetic Monte Carlo simulation that incorporates molecular dynamic simulation to rigorously take the interaction of the deposited atom with the substrate atoms into account. We find three characteristic features of the surface morphology developed by grazing angle deposition: (1) enhanced surface roughness, (2) asymmetric mound, and (3) asymmetric slopes of mound sides. Regarding their dependence on both deposition angle and substrate temperature, a reasonable agreement of the simulated results with the previous experimental ones is found. The characteristic growth features by grazing angle deposition are mainly caused by the inhomogeneous deposition flux due to the steering and screening effects, where the steering effects play the major role rather than the screening effects. Newly observed in the present simulation is that the side of mound in each direction is composed of various facets instead of all being in one selected mound angle even if the slope selection is attained, and that the slope selection does not necessarily mean the facet selection.Comment: 9 pages, 10 figure

Steering effect on the shape of islands for homoepitaxial growth of Cu on Cu(100)

The steering effect on the growth of islands is investigated by combining molecular dynamics (MD) and kinetic Monte Carlo (KMC) simulations. Dynamics of depositing atoms and kinetics of atoms on a substrate are realized by MD and KMC, respectively. The reported experimental results on the asymmetric island growth [van Dijken {\it et al.}, Phys. Rev. Lett. {\bf 82}, 4038 (1999).] is well reproduced. A salient phenomenon, the reversal of the asymmetry, is found as the island size increases, and attributed to the asymmetric flux on the lower terrace of island.Comment: 5 figur