27 research outputs found
Three-dimensional femtosecond laser nanolithography of crystals
Nanostructuring hard optical crystals has so far been exclusively feasible at
their surface, as stress induced crack formation and propagation has rendered
high precision volume processes ineffective. We show that the inner chemical
etching reactivity of a crystal can be enhanced at the nanoscale by more than
five orders of magnitude by means of direct laser writing. The process allows
to produce cm-scale arbitrary three-dimensional nanostructures with 100 nm
feature sizes inside large crystals in absence of brittle fracture. To showcase
the unique potential of the technique, we fabricate photonic structures such as
sub-wavelength diffraction gratings and nanostructured optical waveguides
capable of sustaining sub-wavelength propagating modes inside yttrium aluminum
garnet crystals. This technique could enable the transfer of concepts from
nanophotonics to the fields of solid state lasers and crystal optics.Comment: Submitted Manuscript and Supplementary Informatio