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1 research outputs found
A preliminary study on chemical micro-machining of complex three-dimensional patterns on silicon substrates
Author
A Chatterjee
A Manz
+51Â more
AL Trimmer
C Lebreton
CS Fuller
D Hoffmann
D Mandler
D Mandler
D Mandler
DM Kolb
DM Kolb
Dong-sheng Qu
EW Becker
F Rauwel
FR Fan
H Gerischer
H Gerischer
HJA Dijk van
HY Liu
I Amato
I Duo
I Shohat
J Sun J
Jing Tang
JL Fernábdez
JT Santini
Kang Shi
LA Holland
Li Zhang
Li-Ning Sun
MJ Theunissen
MJJ Theunissen
P Avouris
P Avouris
P Rai-Coudhury
PM Sarro
PMMC Bressers
R Schuster
R Schuster
RG Compton
RM Nyffenegger
RT Potzschke
S Meltzer
V Lehmann
V Lehmann
W Lang
W Li
WR Runyan
YB Zu
Yong-liang Zhou
Zhong-Qun Tian
ZW Tian
ZX Xie
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
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