Pulsed laser deposited barium strontium titanate thin films : Cristallographic and dielectric characterizations

The use of thin films of ferroelectric materials as a non-linear dielectric at microwave frequencies and the integration of tunable dielectrics is actively being investigated for a variety of advanced high frequency applications. This paper is devoted to the elaboration of SrxBa1-xTiO3 (BST) thin films by the pulsed laser deposition technique. The influence of several parameters like substrate temperature and oxygen pressure on the characteristics of these films are investigated by X-ray diffraction for the crystallographic structure and Rutherford Backscattering Spectroscopy for the composition. A cavity resonator technique is used to determine the relative dielectric permittivity of the BST layers