Kinetic simulation of an extreme ultraviolet radiation driven plasma near a multilayer mirror

Future generation lithog. tools will use extreme UV radiation to enable the printing of sub-50 nm features on silicon wafers. The extreme UV radiation, coming from a pulsed discharge, photoionizes the low pressure background gas in the tool. A weakly ionized plasma is formed, which will be in contact with the optical components of the lithog. device. In the plasma sheath region ions will be accelerated towards the surfaces of multilayer mirrors. A self-consistent kinetic particle-in-cell model has been applied to describe a radiation driven plasma. The simulations predict the plasma parameters and notably the energy at which ions impact on the plasma boundaries. We have studied the influence of photoelectron emission from the mirror on the sheath dynamics and on the ion impact energy. Furthermore, the ion impact energy distribution has been convoluted with the formula of Yamamura and Tawara [At. Data Nucl. Data Tables 62, 149 (1996)] for the sputter yield to obtain the rate of phys. sputtering. The model predicts that the sputter rate is dominated by the presence of doubly ionized argon ions. [on SciFinder (R)

Deviations from the local field approximation in negative streamer heads

Negative streamer ionization fronts in nitrogen under normal conditions are investigated both in a particle model and in a fluid model in local field approximation. The parameter functions for the fluid model are derived from swarm experiments in the particle model. The front structure on the inner scale is investigated in a 1D setting, allowing reasonable run-time and memory consumption and high numerical accuracy without introducing super-particles. If the reduced electric field immediately before the front is >= 50kV/(cm bar), solutions of fluid and particle model agree very well. If the field increases up to 200kV/(cm bar), the solutions of particle and fluid model deviate, in particular, the ionization level behind the front becomes up to 60% higher in the particle model while the velocity is rather insensitive. Particle and fluid model deviate because electrons with high energies do not yet fully run away from the front, but are somewhat ahead. This leads to increasing ionization rates in the particle model at the very tip of the front. The energy overshoot of electrons in the leading edge of the front actually agrees quantitatively with the energy overshoot in the leading edge of an electron swarm or avalanche in the same electric field.Comment: The paper has 17 pages, including 15 figures and 3 table

Geometrical Defects in Josephson Junction Arrays

Dislocations and disclinations in a lattice of Josephson junctions will affect the dynamics of vortex excitations within the array. These defects effectively distort the space in which the excitations move and interact. The interaction energy between such defects and excitations are determined and vortex trajectories in twisted lattices are calculated. Finally, possible experiments observing these effects are presented.Comment: 26 pages including 5 figure

Experimental investigation of an atmospheric photoconductively switched high-voltage spark gap

We report on the experimental investigation of the photoconductively switched gas-filled spark gap. When the laser intensity of a femtosecond laser is high enough (around 1018 Wm-2), a plasma can be created that spans the complete distance between the electrodes. The gas-filled spark gap is then closed on a femtosecond timescale, similar to photoconductive switching of a semiconductor switch. Stochastic breakdown processes, such as avalanche and streamer formation that cause the breakdown in laser triggered spark gaps, are passed over, which results in faster risetime and less jitter. Measurements of the switched pulses as a function of laser energy were performed in a 1 mm gap at an applied voltage of 4.5 kV. A clear transition from triggering to switching was measured with increased laser energy. Measurements of the output pulses with the gap filled with nitrogen at 1 atm showed results very similar to measurements in air in the same gap. In the switching regime, the amplitude of the switched pulse did not depend strongly on the laser energy. Measurements at lower applied voltages but with the same gap distance showed that it was possible to switch voltages as low as 10% of the self-breakdown voltage. At low applied voltages, a significant difference between the applied voltage and the output voltage is measured. A possible explanation is given based on the dynamic behavior of the laser created plasma. The measured rise time and jitter of the switched pulses were both below the resolution of the measurement equipment, i.e., better than 100 ps and 15 ps, respectively

Radiative energy loss in a non-equilibrium argon plasma

Abstract. The total radiative loss in atmospheric argon plasmas is calculated allowing for deviations from local Saha equilibrium LSE. We have taken into account non-equilibrium excited state populations using numerical and analytical collisional-radiative models. Simple expressions for the different radiation loss mechanisms are given in terms of the electron density, electron temperature and Ionization degree. These quantities together with the heavy particle temperature also define the deviation from equilibrium. In the recombining zones the effect of non-equilibrium will have significant influence on the total radiative loss due to line radiation. The domlnancy results from the iacl that the electron density in a recombining plasma is much larger than the value predicted by Saha. The results of this study can also be used for non-atmospheric argon plasma provided that n, > 5 x 10lg m-3 and n(1)d z iozo m-* in which d is the plasma dimension

Optical emission spectroscopy of metal-halide lamps: Radially resolved atomic state distribution functions of Dy and Hg

Absolute line intensity measurements are performed on a metal-halide lamp. Several transitions of atomic and ionic Dy and atomic Hg are measured at different radial positions from which we obtain absolute atomic and ionic Dy intensity profiles. From these profiles we construct the radially resolved atomic state distribution function (ASDF) of the atomic and ionic Dy and the atomic Hg. From these ASDFs several quantities are determined as functions of radial position, such as the (excitation) temperature, the ion ratio Hg^+/Dy^+, the electron density, the ground state, and the totaldensity of Dy atoms and ions. Moreover, these ASDFs give us insight about the departure from equilibrium. The measurements show a hollow density profile for the atoms and the ionization of atoms in the center. In the outer parts of the lamp molecules dominate

Numerical description of discharge characteristics of the plasma needle

The plasma needle is a small atmospheric, nonthermal, radio-frequency discharge, generated at the tip of a needle, which can be used for localized disinfection of biological tissues. Although several experiments have characterized various qualities of the plasma needle, discharge characteristics and electrical properties are still not well known. In order to provide initial estimates on electrical properties and quantities such as particle densities, we employed a two-dimensional, time-dependent fluid model to describe the plasma needle. In this model the balance equation is solved in the drift-diffusion approach for various species and the electron energy, as well as Poisson's equation. We found that the plasma production occurs in the sheath region and results in a steady flux of reactive species outwards. Even at small (< 0.1%) admixtures of N-2 to the He background, N-2(+) is the dominant ion. The electron density is typically 10(11) cm(-3) and the dissipated power is in the order of 10 mW. These results are consistent with the experimental data available and can give direction to the practical development of the plasma needle. (c) 2005 American Institute of Physics