Microbeam Analysis System at Tohoku University

A microbeam analysis system has been developed at Tohoku University for biological applications. Spatial resolution of less than 1mum has been achieved with a beam current of ~40pA. In microbeam analysis of biological specimens, simultaneous measurement of structural and elemental properties is very important. Our system is applicable to simultaneous in-air/vacuum PIXE, RBS and STIM analyses. Typical results of biological application are shown