The generation and detection of high flux atomic oxygen for physical vapor deposition thin film growth

The growth of many epitaxial thin-film oxides is significantly enhanced with the use of an oxidizing agent such as atomic oxygen, ozone, or NO2. We developed a flow-through microwave plasma source to generate large atomic oxygen fluxes while maintaining vacuum pressures of less that 1×10¿4 Torr. Continuous and real-time detection of the atomic oxygen was achieved by atomic absorption of the 130 nm atomic oxygen lines. Atomic oxygen fluxes of at least 1.4×1018 atoms/cm2 s and dissociation efficiencies of around 100% were obtaine

Resonant soft x ray scattering studies of interface reconstructions in SrTiO3 LaAlO3 superlattices

We present resonant soft x ray scattering studies of Ti 3d and O 2p states at the interfaces of SrTiO3 LaAlO3 superlattices. From reflectivity analyses, focusing on the 003 peak which is forbidden for our ideal superlattice structure, we concluded that the LaO TiO2 SrO and the SrO AlO2 LaO interfaces have distinct reconstructions, breaking the heterostructure symmetr