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1 research outputs found
Dry Etching
Author
AA Howling
FF Chen
+29 more
FF Chen
FF Chen
FF Chen
H Abe
H Schmidt
HR Han
IP Ganachev
J Schmitt
J-S Park
JY Park
K Komaki
KH Jang
KM Chang
KN Kim
KR Williams
L Latrasse
M Draghici
M Kim
M Moisan
M Pichot
MA Liberman
P Colpo
RW Boswell
S-J Kyung
SJ Jung
SJ Laverty
T Ishijima
T Urisu
Y Setsuhara
Publication venue
'Springer Science and Business Media LLC'
Publication date
01/01/2016
Field of study
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Crossref
Online Research Database In Technology