CORE
CO
nnecting
RE
positories
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Research partnership
About
About
About us
Our mission
Team
Blog
FAQs
Contact us
Community governance
Governance
Advisory Board
Board of supporters
Research network
Innovations
Our research
Labs
Filters
1 research outputs found
Dry Etching
Author
AA Howling
FF Chen
+29 more
FF Chen
FF Chen
FF Chen
H Abe
H Schmidt
HR Han
IP Ganachev
J Schmitt
J-S Park
JY Park
K Komaki
KH Jang
KM Chang
KN Kim
KR Williams
L Latrasse
M Draghici
M Kim
M Moisan
M Pichot
MA Liberman
P Colpo
RW Boswell
S-J Kyung
SJ Jung
SJ Laverty
T Ishijima
T Urisu
Y Setsuhara
Publication venue
'Springer Science and Business Media LLC'
Publication date
01/01/2016
Field of study
Get PDF
Crossref
Online Research Database In Technology
Get PDF
