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3 research outputs found
Calculation of the erosion profile of a cathode for magnetron ion-sputtering systems
Author
A. V. Rogov
B. S. Danilin
+7Â more
B. S. Danilin
I. Yu. Burmakinskii
L. D. Landau
L. Pekker
M. Mayer
V. K. Kalashnikov
Yu. P. Raizer
Publication venue
'Pleiades Publishing Ltd'
Publication date
Field of study
No full text
Crossref
Mechanism of carbon film formation in a discharge with crossed electric and magnetic fields in neon and argon
Author
A. G. Znamenskii
A. V. Sasin
+9Â more
B. K. Ignat’ev
I. A. Chernov
I. N. Serov
I. Yu. Burmakinskii
J. O. Hirschfelder
S. D. Wagner
S. M. Rossnagel
Yu. P. Raizer
Yu. V. Pleskov
Publication venue
'Pleiades Publishing Ltd'
Publication date
Field of study
No full text
Crossref
Effect of resonance charge exchange between argon ions on the effective sputtering rate in a magnetron discharge
Author
A. V. Rogov
B. S. Danilin
+9Â more
F. F. Elakshar
I. Yu. Burmakinskii
K. Macak
M. Kaminsky
M. Touzeau
P. J. Kelly
U. A. Arifov
W. Eckstein
Yu. P. Raizer
Publication venue
'Pleiades Publishing Ltd'
Publication date
Field of study
No full text
Crossref