Volatility studies on single source precursors for LaNiO3 film deposition: Mass spectrometry and thermal analysis

Four volatile heterobimetallic complexes [Ni(Q)La(dik)3] [H2Q = condensation product of 1,2-diaminoethane with salicylic aldehyde or pentane-2,4-dione, Hdik = 1,1,1,5,5,5-hexafluoro-pentane-2,4-dione 1,1,1- trifluoro-5,5,-dimethylhexane-2,4-dione] were selected as prospective single source precursors for LaNiO3 film deposition. Thermal analysis under vacuum, isothermal vacuum sublimation and mass spectrometry were used for comparatively characterizing volatility and thermal stability of the heterobimetallic complexes. The problem of intact sublimation of [Ni(Q)La(dik)3] is discussed in correlation with the nature of the ligands - Q2- and dik- - and solid state features of the complexes

MOCVD of Ag thin films

The new mixed ligand complex [(n-Bu3P)Ag((CH3)3CCOO)] (I) is suggested as precursor for MOCVD of Ag thin films. It was characterized by elemental, TG analysis and by mass-spectrometry. It was shown that gas phase consisted only from monomeric molecules of I. X-ray study of (I) shows that crystal structure is build up from dimeric units with van der Waals interactions between them. Ag films were grown on Si and oxide substrates using I and [(Ag((CH3)3CCOO)] (II) precursors by CVD technique in presence of oxygen. The dependence of the films thickness, orientation and microstructure on the process parameters was defined. The use of the adduct was found to be at least 20 times more effective (regarding the film thickness) in comparison to that of II

Heterobimetallic single-source precursors for MOCVD. Synthesis and characterization of volatile mixed ligand complexes of lanthanides, barium and magnesium β-diketonates with d-element containing ligands

Several heterobimetallic complexes of general formula [(M1Q)mM2(dik)n], where (M1Q) is Cu(salen) or Ni(salen) and M2(dik)n is a lanthanide tris(β-diketonate) or an alkali-earth element bis(β-diketonate) with more or less fluorinated diketonato(-) ligands, have been prepared and structurally characterized. Some of them were submitted to thermal and mass spectrometry analyses, and to isothermal vacuum sublimation tests, in view of their potential use as MOCVD single-source precursors for the deposition of heterobimetallic materials. The study stresses upon the influence of the nature of the diketone, of the M2 cation, and of chemical modification of the salen ligand on the thermal behaviours of the complexes. Some preliminary CVD experiments are also described