Application of incremental polymeric scales for high precision piezoelectric angular positioning system

A high precision piezoelectric rotational stage with low-cost incremental polymeric scales is proposed and investigated in this work. For avoiding datum plane surface errors caused by application of additional bearings to support the rotational part, the latter one contacts with a stationary piezoelectric disc, which oscillates in travelling wave mode, at three specific points via contacting ring. The resolution of rotation is determined only by geometrical errors of external surface of the piezoelectric disc and can be easily achieved to be in the range of 1 µm. Low-cost polymeric scales are applied to measure angular displacement by means of moiré fringes. Peculiarities of scales fabrication are defined taking into consideration the final accuracy of the device

Development of two modifications of piezoelectric high resolution rotary table

The aim of this paper is to describe two modifications of high resolution rotary tables with angular position control, based on the transformation of resonant oscillations of piezoelectric transducers into continuous or start-stop motion. Exact angular position of the table is achieved by application of integrated classical rotary position encoders and feedback system, related to the given position or angular velocity of the device. Dimensions and cost of the table should be dramatically reduced, thus ensuring competitiveness in modern markets

R&D of high resolution rotary table based on the ultrasonic standing waves

This paper covers the essential information associated with recently developed piezoelectric rotary drive being able to act as the basis for most of forthcoming relevant devices. The aim of the work is to investigate such a novel table the operation of which relies on transformation of resonant ultrasonic standing wave oscillations into continuous or start-stop motion. Angular position of the device is registered by means of integrated optical encoder-type subsystem. A significant attention is paid to the structure, numerical analysis and dynamic characteristics of the drive