Gaussian laser beam shaping: Test and evaluation

A method for converting single mode Gaussian beams into beams with uniform irradiance profiles is described. This technique has application to laser cutting and welding, laser ablation, semiconductor mask fabrication, and other tasks. Currently, designs for rectangular and circular flat top profiles have been investigated. Experimental results are presented for an element that converts a single mode Gaussian beam into a square, flat top spot. The design is based on a Fourier transform relation between the input and output beam functions and can be implemented as a diffractive or refractive element. The form of the element reduces to a common equation that is scaled for the particular geometry involved. This scale factor contains the product of the widths of the input and output beams, the focal length of the system, and the wavelength. It is a dimensionless quantity that uniquely determines the quality of the target spot, regardless of wavelength or system geometry. A designer can thus start from a desired target quality and lay out the required optical system to achieve that quality, in contrast to an iterative approach

Optical measurement of micromachine engine performance

Understanding the mechanisms that impact the performance of Microelectromechanical Systems (MEMS) is essential to the development of optimized designs and drive signals, as well as the qualification of devices for commercial applications. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {mu}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. The authors describe the development of Micromachine Optical Probe (MOP) technology for the evaluation of micromachine performance. The MOP approach is based on the detection of optical signals scattered by the gear teeth or other physical structures. They present experimental results for a prototype system designed to measure engine parameters as well as long term performance data

A Method for Achieving Constant Rotation Rates in a Micro-Orthogonal Linkage System

Silicon micromachine designs include engines that consist of orthog- onally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50 {micro}m in diameter and can be driven at rotation rates exceeding 300,000 rpm. Generally, these en- gines will run with non-uniform rotation rates if the drive signals are not properly designed and maintained over a range of system parameters. We present a method for producing constant rotation rates in a micro-engine driven by an orthogonal linkage system. We show that provided the val- ues of certain masses, springs, damping factors, and lever arms are in the right proportions, the system behaves as though it were symmetrical. We will refer to systems built in this way as being quasi-symmetrical. We show that if a system is built quasi-symmetrically , then it is possible to achieve constant rotation rates even if one does not know the form of the friction function, or the value of the friction. We analyze this case in some detail

Burn Depth Estimation Using Thermal Excitation and Imaging

Accurate estimation of the depth of partial-thickness burns and the early prediction of a need for surgical intervention are difficult. A non-invasive technique utilizing the difference in thermal relaxation time between burned and normal skin may be useful in this regard. In practice, a thermal camera would record the skin's response to heating or cooling by a small amount-roughly 5{degrees} Celsius for a short duration. The thermal stimulus would be provided by a heat lamp, hot or cold air, or other means. Processing of the thermal transients would reveal areas that returned to equilibrium at different rates, which should correspond to different burn depths. In deeper thickness burns, the outside layer of skin is further removed from the constant-temperature region maintained through blood flow. Deeper thickness areas should thus return to equilibrium more slowly than other areas. Since the technique only records changes in the skin's temperature, it is not sensitive to room temperature, the burn's location, or the state of the patient. Preliminary results are presented for analysis of a simulated burn, formed by applying a patch of biosynthetic wound dressing on top of normal skin tissue

Modeling an optical micromachine probe

Silicon micromachines are fabricated using Surface Micro-Machining (SMM) techniques. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small a 50-{micro}m in diameter and can be driven at rotation rates exceeding 300,000-rpm. Measuring and analyzing microengine performance is basic to micromachine development and system applications. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. The authors describe the modeling of an optical probe developed at Sandia National Laboratories. Experimental data will be compared with output from the model

Optical measurement of LIGA milliengine performance

Understanding the parameters that affect the performance of milliscale and microscale actuators is essential to the development of optimized designs and fabrication processes, as well as the qualification of devices for commercial applications. This paper discusses the development of optical techniques for motion measurements of LIGA fabricated milliengines. LIGA processing permits the fabrication of precision millimeter-sized machine elements that cannot be fabricated by conventional miniature machining techniques because of their small feature sizes. In addition, tolerances of 1 part in 10{sup 3} to 10{sup 4} may be maintained in millimeter sized components with this processing technique. Optical techniques offer a convenient means for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. Optical techniques can also be used to provide feedback signals needed for control and sensing of the state of the machine. Optical probe concepts and experimental data obtained using a milliengine developed at Sandia National Laboratories are presented