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174 research outputs found

Creating Three‐Dimensional Polymeric Microstructures by Multi‐Beam Interference Lithography

Author: Escuti M. J.
Hinsberg W.
Joannopoulos J. D.
Jun Hyuk Moon
Kawata S.
Nonogaki S.
Sharp D. N.
Shu Yang
Thompson L. F.
Vozzi G.
Publication venue: 'Informa UK Limited'
Publication date
Field of study

Recent advances in the study of high-pressure binary systems

Self-aligned patterning on a flexible substrate using a dual-tone, thermally activated photoresist

Author: Hinsberg W. D.
Hinsberg W. D.
Publication venue: 'American Vacuum Society'
Publication date
Field of study

Effect of Inhomogeneous Acid Distribution on Line Edge Roughness-Relationship to Line Edge Roughness Originating from Chemical Gradient

Author: HINSBERG W D
Publication venue: 'Technical Association of Photopolymers, Japan'
Publication date: 01/01/2010
Field of study

EUV Lithography Development and Research Challenges for the 22 nm Half-pitch

Author: HINSBERG W D
WURM STEFAN
Publication venue: 'Technical Association of Photopolymers, Japan'
Publication date: 01/01/2009
Field of study

Image Formation in Chemically Amplified Resists upon Exposure to Extreme Ultraviolet Radiation

Author: HINSBERG W D
PALMATEER S C
Publication venue: 'Technical Association of Photopolymers, Japan'
Publication date: 01/01/2009
Field of study

Lithographic Imaging Techniques for the Formation of Nanoscopic Features

Author: G. M. Wallraff
W. D. Hinsberg
Publication venue: 'American Chemical Society (ACS)'
Publication date
Field of study

Enzyme-linked sandwich immunoassay for insulin using laser fluorimetric detection.

Author: R. N. Zare
S. D. Lidofsky
W. D. Hinsberg
Publication venue: 'Proceedings of the National Academy of Sciences'
Publication date
Field of study

Kinetic Model for Positive Tone Resist Dissolution and Roughening

Author: F. A. Houle
M. I. Sanchez
W. D. Hinsberg
Publication venue: 'American Chemical Society (ACS)'
Publication date
Field of study

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