Computational algorithms for optimizing mask layouts in proximity printing

We use numerical simulation and optimization algorithms to apply optical proximity correction (OPC) to different mask structures for exposure on a Mask Aligner in proximity mode. The range of OPC solutions reaches from subtle changes in the mask layout to masks that have lost almost all resemblance to the structure to be printed. An extreme case is the printing of periodic structures where we make use of the image reversal caused by the Talbot effect. We also show the improvement that can be obtained when co-optimizing the angular spectrum of the illumination, i.e. when performing a source-mask optimization (SMO)

Acoustical force nanolithography of thin polymer films Original Paper

Nanomachining of thin polymer resist films with an atomic force microscope (AFM) is a promising route for the fabrication of nanoscale devices. In order to enhance the controllability of the nanomachining process an in-plane acoustic wave is coupled to the sample support. This enhances the intermittent force exerted by the AFM tip. The lateral resolution reached by this method is only limited by the physical size of the AFM tip to dimensions far below the light diffraction limit. The main process parameters are the frequency and magnitude of the acoustic wave, and the preloading force. In this work, the feasibility of acoustical force lithography and the influence of the relevant parameters are investigated

Can Privatization Deliver?: Infrastructure for Latin America

While privatization of water, electricity, transport and communications infrastructure continues to gain momentum in Latin America, its success often depends on whether countries implement the reforms essential to attract private investment. This book analyzes the legal, regulatory, economic and institutional issues that are key to smoothing the transition to privatized infrastructure. As the reform process reaches economies that are smaller and less developed, the emphasis is on establishing sound and credible rules that foster private initiative, preserve property rights, settle disputes and protect contracts and consumers. Distinguished analysts from the private sector, academia, the banking community and international multilateral institutions recommend reforms to promote private sector involvement in infrastructure and bring national legal systems in line with international standards. Case studies examine privatization of electricity in Central America and water systems in Trinidad and Tobago and Chile