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2 research outputs found
Minimizing damage and contamination in RIE processes by extracted-plasma-parameter analysis
Author
Fukui Hirofumi
Hasaka Satoshi
+3 more
Natori Iwao
Ohmi Tadahiro
Yamashita Takeo
Publication venue
'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
21/04/2010
Field of study
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Tohoku University Repository (TOUR) / 東北大学機関リポジトリ
Institutional Repositories DataBase (IRDB)
Physical and Electrical Properties of Ultra Thin Yttrium-Aluminate Film
Author
Hideki HASHIMOTO
Kazuto IKEDA
+7 more
KOLITSCH U
Masanori OOSAWA
Minoru INOUE
Satoshi HASAKA
Takashi YAMAMOTO
Yoshihiro SUGITA
Yukiko IZUMI
Publication venue
'Surface Science Society Japan'
Publication date
01/01/2005
Field of study
No full text
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