Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography

Extreme ultraviolet (EUV) lithography is currently entering high-volume manufacturing to enable the continued miniaturization of semiconductor devices. The required EUV light, at 13.5 nm wavelength, is produced in a hot and dense laser-driven tin plasma. The atomic origins of this light are demonstrably poorly understood. Here we calculate detailed tin opacity spectra using the Los Alamos atomic physics suite ATOMIC and validate these calculations with experimental comparisons. Our key finding is that EUV light largely originates from transitions between multiply-excited states, and not from the singly-excited states decaying to the ground state as is the current paradigm. Moreover, we find that transitions between these multiply-excited states also contribute in the same narrow window around 13.5 nm as those originating from singly-excited states, and this striking property holds over a wide range of charge states. We thus reveal the doubly magic behavior of tin and the origins of the EUV light

Observation of interspecies ion separation in inertial-confinement-fusion implosions

We report direct experimental evidence of interspecies ion separation in direct-drive, inertial-confinement-fusion experiments on the OMEGA laser facility. These experiments, which used plastic capsules with D2/Ar gas fill (1% Ar by atom), were designed specifically to reveal interspecies ion separation by exploiting the predicted, strong ion thermo-diffusion between ion species of large mass and charge difference. Via detailed analyses of imaging x-ray-spectroscopy data, we extract Ar-atom-fraction radial profiles at different times, and observe both enhancement and depletion compared to the initial 1%-Ar gas fill. The experimental results are interpreted with radiation-hydrodynamic simulations that include recently implemented, first-principles models of interspecies ion diffusion. The experimentally inferred Ar-atom-fraction profiles agree reasonably, but not exactly, with calculated profiles associated with the incoming and rebounding first shock