A piezoelectric micropump based on micromachining of silicon

The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off)

A thermopneumatic micropump based on micro-engineering techniques

The design, working principle and realization of an electro-thermopneumatic liquid pump based on micro-engineering techniques are described. The pump, which is of the reciprocating displacement type, comprises a pump chamber, a thin silicon pump membrane and two silicon check valves to direct the flow. The dynamic pressure of an amount of gas contained in a cavity, controlled by resistive heating, actuates the pump membrane. The cavity, chambers, channels and valves are realized in silicon wafers by wet chemical etching. Experimental results are presented. Maximum yield and built-up pressure equal 34 ¿l/min and 0.05 atm, at a supply voltage of 6 V. Results of simulations show good agreement with the actual dynamic behaviour of the pump

Pumping of liquids with ac voltages applied to asymmetric pairs of microelectrodes

The net flow of electrolyte induced by an ac electric potential applied to an array of asymmetric pairs of microelectrodes has recently been reported. The interaction between the oscillating electric field and the oscillating induced charge at the diffuse double layer on the electrodes results in a steady electro-osmotic velocity distribution on top of the electrodes. This slip velocity distribution is anisotropic and produces a net flow of fluid. This paper presents a theoretical analysis of the pumping phenomena based upon an electro osmotic model in ac fields. The electrical equations are solved numerically using the charge simulation method. The bulk flow generated by the electro-osmotic slip velocity is calculated. The dependence of the fluid flow on voltage and frequency is described and compared to experiment