CHOCLAB - Instruments and Standard-Test Procedures for Laser Beam and Optics Characterisation. Untersuchungen zur normungsrelevanten Charakterisierung der Strahlparameter von Excimerlasern. Teilvorhaben: Charakterisierung und Standard-Testverfahren fuer Laserstrahlung und optische Komponenten Abschlussbericht

The target of the project Investigations to the characterisation of beam parameters of excimerlaser for standardisation within the EUREKA-project EUROLASER CHOCLAB: Instruments and Standard Test Procedures for Laser Beam and Optics Characterisation was the scientific development of measurement procedures and techniques for characterising the beam parameters of excimer lasers to overcome the deficit of standardisation for this important industrial laser class. A special UV-camera based beam profile measurement system was developed for measuring the energy density distribution of laser beams in the near as well as the far field. Different procedures to determine the beam parameters beam width, divergence, beam position and beam pointing stability were investigated and compared to each other to find the most useful and reliable one for excimer laser beams. In addition, the special temporal behaviour of the beam parameters was analysed when the laser worked in the typical burst mode. Basing on these results guidelines were developed for measurement technique and evaluation procedures for standardised characterisation of excimer laser beams. (orig.)SIGLEAvailable from TIB Hannover: F99B315+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany); European Union (Euro), Brussels (Belgium)DEGerman