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1 research outputs found
Observations on Polishing and Ultraprecision Machining of Semiconductor Substrate Materials
Author
Blackley
Cook
+21Â more
Daw
H.K. Toenshof
I. Inasaki
I.D. Marinescu
Ikawa
Ikawa
Jeong
Ohmori
Ohmori
Patrick
Rentsch
Rentsch
Roberts
Runnels
Shimada
T. Nakagawa
Toenshoff
Toenshoff
V.C. Venkatesh
Venkatesh
Zhong
Publication venue
'Elsevier BV'
Publication date
01/01/1995
Field of study
No full text
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