6 research outputs found
Comparative determination of the electron temperature in Ar- and N
The electron temperature Te as the often most essential parameter for
applications of low pressures plasma has been derived from comparative in situ
measurements with a single and a double electrostatic probe, and with optical emission
spectroscopy OES and energy dispersive mass spectrometry EDMS as remote techniques.
Electrodeless rf discharges maintained by electron cyclotron wave resonance ECWR in pure Ar
and N2 in the pressure regime from 10−2 to 1 Pa have been used as sample plasmas.
The evaluation of the OES- and EDMS-signals is described in detail. The pressure dependence
of the Te-results derived therefrom is found to compare well with the data from the
probe measurements, and with calculations from a charge carrier balance equation. By
matching the OES data to the absolute Te-values from the probe measurements,
numerical expressions have been obtained by which Te can be quantitatively
calculated from the intensity ratios between selected emission lines from the Ar- and the
N2-plasma. Furthermore, the EDMS-results are also shown to deliver quantitative
information about Te