Study of Dynamics and Mechanism of Metal-Induced Silicon Growth

The present study addresses the mechanism of metal-induced growth of device-quality silicon thin films. Si deposition was performed by magnetron sputtering on a 25-nm-thick Ni prelayer at 525–625 °C and yielded a continuous, highly crystalline film with a columnar structure. A Ni disilicide intermediate layer formed as a result of the Ni reaction with Si deposit provides a sufficient site for the Si epitaxial growth because lattice mismatch is small between the two materials. The reaction between Ni and Si was observed to progress in several stages. The NixSiy phase evolution in a Ni:Si layer was studied by x-ray photoelectron spectroscopy, Auger electron spectroscopy, Rutherford backscattering spectrometry, transmission electron microscopy, and x-ray diffraction and found to be controlled by the Ni-to-Si concentration ratio at the growing front. After Ni is completely consumed in the silicide, continued Si deposition leads to the nucleation and growth of Si crystals on the surface of the NiSi2 grains. The issues related to the nature of NixSiy phase transformations and Si heteroepitaxy are discusse

Characterization of Poly-Si Thin Films Deposited by Magnetron Sputtering onto Ni Prelayers

A method of producing a polycrystalline silicon thin film on a foreign substrate without subsequent annealing has been developed. Thermally evaporated 5–100 nm thick Nifilms served as prelayers for magnetron sputtered Si thin films. A continuous film was obtained as a result of metal induced growth of polysilicon during low temperature (below 600 °C) deposition. The film uniformity is promising for large area device applications. The influence of the Ni prelayer thickness on the grain size of thus obtained films was investigated. Atomic force microscopy and cross-sectional scanning electron microscopy studies revealed features in the 150–600 nm size range while x-ray diffraction and Raman spectra analysis predicted 50–100 nm diam randomly oriented grains and a complete absence of an amorphous phase. The carrier lifetime was evaluated to be 11 μs

Self-Assembly of Spatially Separated Silicon Structures by Si Heteroepitaxy on Ni Disilicide

A nonlithographic approach to produce self-assembled spatially separated Si structures for nanoelectronic applications was developed, employing the metal-induced silicon growth. Densely packed Si whiskers, 500–800 nm thick and up to 2500 nm long, were obtained by magnetron sputtering of Si on a 25 nm thick Ni prelayer at 575 °C. The nucleation of the NiSi2 compound at the Ni–Si interface followed by the Si heteroepitaxy on the lattice-matched NiSi2 is suggested to be the driving force for the whisker formation

A 0.5 μm Thick Polysilicon Schottky Diode with Rectification Ratio of 10^6

Polycrystalline Si films, 0.5-mm thick, were obtained as a result of metal-induced growth by sputtering from a Si target on 25 nm thick Ni prelayers at 525 °C. Silicon grew heteroepitaxially on the NiSi2 layer formed due to the reaction between the sputtered Si atoms and Ni. Schottky diodes were fabricated on the Si films by deposition of a Schottky metal on the front surface of the film while Ni disilicide provided an intimate ohmic contact at the back. A Pd/n-Si diode using an n-Si film annealed for 2 h at 700 °C in forming gas demonstrated a rectification ratio of 106, while an as-deposited p-Si film provided an Al/p-Si diode with rectification of five orders of magnitude. Schottky barrier properties are briefly discussed

Anisotropic Electrical Properties of Nanostructured Metallic Thin Films

High surface area, porous, metallic (Ti, Cr) nanorod thin ¯lms with columnar microstructure can be deposited using conventional physical vapor deposition technique of E-beam evaporation. The technique relies on the physical vapor deposition onto a static substrate oriented in a position where °ux from the source material (Ti, Cr) arrives at oblique angle. The adatoms provides geometrical shadowing which results in growth of nanorod columns in the direction of vapor source. Deposition conditions such as angle of the incoming vapor °ux, substrate temperature, surface di®usion etc. have strong in°uence on the shape and arrangement of the columnar thin ¯lms. In this work, we demonstrate the growth and electrical characterization of these nanostructured thin ¯lms. Preliminary results on these ¯lms exhibit electrical resis- tivity anisotropy, when characterized by measuring their electrical resistivity using conventional van der pauw method. Origin and possible causes of this resistivity anisotropy is discussed

Implementation of a Si/SiC Hybrid Optically Controlled High-Power Switching Device

The ever-increasing performance and economy of operation requirements placed on commercial and military transport aircraft are resulting in very complex systems. As a result, the use of fiber optic component technology has lead to high data throughput, immunity to EMI, reduced certification and maintenance costs and reduced weight features. In particular, in avionic systems, data integrity and high data rates are necessary for stable flight control. Fly-by-Light systems that use optical signals to actuate the flight control surfaces of an aircraft have been suggested as a solution to the EMI problem in avionic systems. Current fly-by-light systems are limited by the lack of optically activated high-power switching devices. The challenge has been the development of an optoelectronic switching technology that can withstand the high power and harsh environmental conditions common in a flight surface actuation system. Wide bandgap semiconductors such as Silicon Carbide offer the potential to overcome both the temperature and voltage blocking limitations that inhibit the use of Silicon. Unfortunately, SiC is not optically active at the near IR wavelengths where communications grade light sources are readily available. Thus, we have proposed a hybrid device that combines a silicon based photoreceiver model with a SiC power transistor. When illuminated with the 5mW optical control signal the silicon chip produces a 15mA drive current for a SiC Darlington pair. The SiC Darlington pair then produces a 150 A current that is suitable for driving an electric motor with sufficient horsepower to actuate the control surfaces on an aircraft. Further, when the optical signal is turned off, the SiC is capable of holding off a 270 V potential to insure that the motor drive current is completely off. We present in this paper the design and initial tests from a prototype device that has recently been fabricated

Functional Nanoparticles in Thin Films as Sensing Media

The combination of unique properties offered by materials on the nanoscale with the increased role of surface chemistry in nanostructured solids makes core-shell nanoparticles extremely attractive for application to smart thin-film coatings. Sensing properties of nanoparticle-based thin films were studied in several systems containing organic-coated semiconductor and metallic particles. In semiconductors, the interaction of organic shell and/or thin-film matrix with the environment results in changes in the nanoparticle\u27s surface states, altering the optical properties of the thin film. Measuring the electrical properties of thin films composed of metallic cores with hydrocarbon shells offers another mechanism to monitor the local environment through the swelling of the hydrocarbons in the presence of external compounds. These mechanisms and their potential application to novel sensors will be discussed

A Threshold-Based Approach to Calorimetry in Helium Droplets: Measurement of Binding Energies of Water Clusters

Helium dropletbeam methods have emerged as a versatile technique that can be used to assemble a wide variety of atomic and molecular clusters. We have developed a method to measure the binding energies of clusters assembled in helium droplets by determining the minimum droplet sizes required to assemble and detect selected clusters in the spectrum of the dopeddropletbeam. The differences in the droplet sizes required between the various multimers are then used to estimate the incremental binding energies. We have applied this method to measure the binding energies of cyclic waterclusters from the dimer to the tetramer. We obtain measured values of D0 that are in agreement with theoretical estimates to within ∼20%. Our results suggest that this threshold-based approach should be generally applicable using either mass spectrometry or optical spectroscopy techniques for detection, provided that the clusters selected for study are at least as strongly bound as those of water, and that a peak in the overall spectrum of the beam corresponding only to the cluster chosen (at least in the vicinity of the threshold) can be located

Fluorinated Templates for Energy-Related Nanomaterials and Applications

Fluorinated ionomer membranes, as represented by the commercially available Nafion films, are macroscopically homogeneous and optically transparent but microscopically inhomogeneous with the presence of nanoscale hydrophilic cavities. These cavities serve as nanoscale reactors for the synthesis of nanoparticles from a variety of materials. The membranes with embedded nanoscale semiconductors, still optically transparent, have been used as sheet-photocatalysts for energy conversion applications, while those with embedded reactive metals used as nano-energetic materials for hydrogen generation and beyond. This chapter provides an overview on the templated synthesis of nanomaterials in fluorinated ionomer membranes and the various energy-related applications of this unique class of nanocomposite materials

Fluorinated Templates for Energy-Related Nanomaterials and Applications

Fluorinated ionomer membranes, as represented by the commercially available Nafion films, are macroscopically homogeneous and optically transparent but microscopically inhomogeneous with the presence of nanoscale hydrophilic cavities. These cavities serve as nanoscale reactors for the synthesis of nanoparticles from a variety of materials. The membranes with embedded nanoscale semiconductors, still optically transparent, have been used as sheet-photocatalysts for energy conversion applications, while those with embedded reactive metals used as nano-energetic materials for hydrogen generation and beyond. This chapter provides an overview on the templated synthesis of nanomaterials in fluorinated ionomer membranes and the various energy-related applications of this unique class of nanocomposite materials