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55 research outputs found
Investigation of attractive forces between PECVD silicon nitride microstructures and an oxidized silicon substrate
Author
Castagne
Guckel
+14 more
Haisma
Israelachvili
J.A. Voorthuyzen
Linder
Lober
Mehregany
P. Bergveld
P.R. Scheeper
Sessler
Shimbo
Stengl
Voorthuyzen
Voorthuyzen
W. Olthuis
Publication venue
'Elsevier BV'
Publication date
Field of study
Full text link
Crossref
Micromachined pressure sensors: review and recent developments
Author
Bassous E
+62 more
Bean K E
Bergqvist J
Bernstein J
Bernstein J
Borky J M
Bryzek J
Bryzek J
Burns D W
Burns D W
Chau H-L
Cho S T
Clark S K
de Lambilly H
Eaton W P
Eaton W P
Eaton W P
Frobenius W D
Ghandi S K
Gieles A C M
Grunthaner F
Guckel H
Guckel H
Hoppe K
J H Smith
Kim E S
Kloeck B
Ko W S
Lasky J B
Lee K W
Mastrangelo C H
Mastrangelo C H
Mayer G K
Meindl J D
Nasby R D
Oliver F J
Peake E R
Petersen K
Petersen K E
Petersen K E
Petersen K E
Pomerantz D I
Preliminary information
Samaun
Sanchez J C
Sander C S
Schumann E
Schöenberg U
Shimaoka K
Sniegowski J J
Spangler L
Sugiyama S
Sugiyama S
Suhir E
Sze S M
Timoshenko S
W P Eaton
Wagner D
Wallis G
Walsh S
Welham C J
Yang X
Zhang Y
Publication venue
'IOP Publishing'
Publication date
Field of study
Full text link
Crossref
Surface micromachined mechanisms and micromotors
Author
Bart S F
Bart S F
+43 more
Bart S F
Behi F
Brennan R A
Chen L Y
Deng K
Ehrfeld W
Fan
Fan L S
Fan L S
Feury A M
Gabriel K J
Gabriel K J
Greenwood J C
Guckel H
Guckel H
Howe R T
Howe R T
Kim C J
Lang J H
Lang J H
Lee Y S
Lim M G
Lober T A
Lober T A
M Mehregany
Mehregany M
Mehregany M
Mehregany M
Mehregany M
Mehregany M
Moroney R M
Muller R S
Nathanson H C
Paschen F
Schmidt M A
Suzuki K
Tai Y C
Tai Y C
Tai Y C
Tang W C
Tavrow L S
Tavrow L S
Yu-Chong Tai
Publication venue
'IOP Publishing'
Publication date
Field of study
Full text link
Crossref
Oxygen quenching effect in ultra-deep x-ray lithography with SU-8 resist
Author
Bogdanov A L
Bor-Yuan Shew
+17 more
Chang H K
Chang-Pin Chou
Cheng Y
Chong J
Chou P J Bowden G B Copeland M R Menegat A Siemann R H
Cremers C
Ehrfeld W
Guckel H
Kun-Pei Liu
Kupka R K
Lee K
Lorenz H
Senich G A
Shew B Y
Singleton L
Song J J Bajikar S Kang Y W Kustom R L Mancini D C Nassiri A Lai B
Tai-Yuan Huang
Publication venue
'IOP Publishing'
Publication date
Field of study
Full text link
Crossref
A model of drop size distribution for a system with evaporation.
Author
Bourke P.M.A.
Guckel W.
Holmes S.J.I.
Koizumi M.
Publication venue
'Wiley'
Publication date
Field of study
No full text
Crossref
Microfabrication Using X- ray Lithography
Author
A.A. Sokolov
A.A. Sokolov
+20 more
D. H. Tomboulian
D.H. Tomboulian
D.W.L. Tolfree
E. Becker
E.M. Rowe
H. Guckel
H. Guckel
H. Winick
I.M. Ternov
J.G. Timothy
N. Marks
P. Bley
P. Bley
P. Elleaume
S. Yamamonto
W. Ehrfeld
W. Ehrfeld
W. Ehrfeld
W. Ehrfeld
W. Ehrfeld
Publication venue
'Springer Science and Business Media LLC'
Publication date
01/01/2007
Field of study
No full text
Crossref
Mechanical integrity of polysilicon films exposed to hydrofluoric acid solutions
Author
H. Guckel
H. Guckel
+11 more
J. A. Walker
J. M. Jaffe
J. W. Beams
James A. Walker
Kaigham J. Gabriel
M. Mehregany
M. Mehregany
Mehran Mehregany
P. G. Hoel
R. T. Howe
S. Timoshenko
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
No full text
Crossref
Parallel-plate electrostatic actuation with vertical hinges
Author
Carrozza M C
Ehrfeld W
+15 more
Fan L
Gabriel K J
Guckel H
Guckel H
Higuchi T
Howe R T
Isao Shimoyama
Kahn H
Kiang M H
Mehregany M
Murat Gel
Okyar M M
Pister K S J
Schmidt D
Shimoyama I
Publication venue
'IOP Publishing'
Publication date
Field of study
No full text
Crossref
Vapor Pressures and Evaporation Studies of Sugars and Sugar Alcohols
Author
Clark I. T.
Elder J. P.
+9 more
Gerrit V. L.
Goodrum J. W.
Guckel W.
Guido B.
Herbert B. C.
Lide D. R.
Nelson L. D.
Wiedemann H. G.
Yau M. K.
Publication venue
'American Chemical Society (ACS)'
Publication date
Field of study
No full text
Crossref
An effective method of determining the residual stress gradients in a micro-cantilever
Author
AH Nayfeh
AL Thurman
+25 more
CA Klein
E Abdel-Rahman
EH Yang
H Guckel
H Guckel
J Qian
J Yang
KJ Cheng
L Elbrecht
L Kiesewetter
L Lin
L Que
LB Freund
M Mehregany
MG Allen
PH McDonald
S Timoshenko
SCH Lin
T Ikehara
VT Srikar
W Fang
W Fang
Y Gianchandani
Ya-pu Zhao
Yin Zhang
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
No full text
Crossref
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