15 research outputs found
Effects of molecular contamination and sp carbon on oxidation of (100) single-crystal diamond surfaces
The efficacy of oxygen (O) surface terminations of specific moieties and
densities on diamond depends on factors such as crystallinity, roughness, and
crystal orientation. Given the wide breadth of diamond-like materials and
O-termination techniques, it can be difficult to discern which method would
yield the highest and most consistent O coverage on a particular subset of
diamond. We first review the relevant physical parameters for O-terminating
single-crystalline diamond (SCD) surfaces and summarize prior oxidation work on
(100) SCD. We then report on our experimental study on X-ray Photoelectron
Spectroscopy (XPS) characterization of (100) diamond surfaces treated with
oxidation methods that include wet chemical oxidation, photochemical oxidation
with UV illumination, and steam oxidation using atomic layer deposition. We
describe a rigorous XPS peak-fitting procedure for measuring the
functionalization of O-terminated samples and recommend that the reporting of
peak energy positions, line shapes, and full-width-half-maximum values of the
individual components, along with the residuals, are important for evaluating
the quality of the peak fit. Two chemical parameters on the surface, sp C
and molecular contaminants, are also crucial towards interpreting the O
coverage on the diamond surface and may account for the inconsistency in prior
reported values in literature