Functional Synthesis of a New Class of Micro Electro-Mechanical Systems

This paper discloses a new method of functional synthesis of a new class of MEMS (Micro Electro-Mechanical Systems) that could be conceived thanks to: (a) a new concept flexural hinge (that has been recently patented by the Author) and (b) the accurate detection of a MEMS device pseudo-rigid-body equivalent mechanism, which allows the application of several classic algorithms well known in kinematic synthesis. The adopted approach is explained and two examples are presented. Finally, basic information is provided for the MEMs technology based construction process that has been used for prototyping