Stable high power deep-uv enhancement cavity in ultra-high vacuum with fluoride coatings

We demonstrate the superior performance of dielectric fluoride coatings versus oxide coatings in long term vacuum operation of a high power deep-ultraviolet enhancement cavity. In ultra-high vacuum (10(-8) mbar), the fluoride optics can maintain up to 10 W of stable intracavity power on one hour time scales, a record-high at these vacuum levels, whereas for the oxide optics, we observe rapid degradation at lower intracavity powers with a rate that increases with power. After observing degradation in high vacuum, we can recover the fluoride and oxide optics with oxygen; however, this recovery process becomes ineffective after several applications. For the fluoride optics, we see that initial UV conditioning in an oxygen environment helps to improve the performances of the optics. In oxygen-rich environments from similar to 10(-4) mbar, the fluoride optics can stably maintain up to 20 W of intracavity power on several-hour time scales whereas for the oxide optics there is immediate degradation with a rate that increases with decreasing oxygen pressure. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing AgreementISSN:1094-408