Applications of the LTCC ceramics in microplasma systems

In this paper the current status of microplasma devices and systems made in the LTCC technology is presented. The microplasma characteristics and applications are described. We discuss the properties of the LTCC materials, that are necessary for reliable operation of the sources. This material is well known for its good reliability and durability in harsh conditions. Still, only a few examples of such microplasma sources are described. Some of them have been developed by the authors and successfully used for chemical analysis and synthesis

The Investigation of Conductive Via Properties

The investigation ofthe Low Temperature Co-fired Ceramic (L TCC) via filling process quality is presented in this paper. The goal of this paper was to propose and to validate a way of the verification whether the L TCC fabrication was conducted correctly. The work presents an application of the Design of the Experiment (DoE) methodology in such validation and discusses usefulness and drawbacks of the chosen solution. The optimized technology of via filling will be applied in the fabrication of tactile displays for blind people

Low Temperature Co-fired Ceramics Plasma Generator for Atmospheric Pressure Gas Spectroscopy

AbstractAccurate and reliable measurements of gas composition are very important in science and industry applications. One way to accomplish this task is to measure spectrum of plasma gas discharge. In our work we propose integrated microcell for optical measurements of gas discharge at atmospheric pressure. This device is fabricated using Low Temperature Co-fired Ceramics (LTCC) technology. Investigated gas is excited in buried air-cavity, placed between two electrodes. Discharge is created using high alternating voltage (30kV). Optical signal is then transmitted through an integrated optical fiber to the miniature spectrometer. Because different gases have different emission lines, plot of light intensity vs. wavelength provides information about molecular composition of the investigated gas sample. In this work, design, fabrication and performance of the LTCC- based gas discharge chamber is presented. Spectral measurements are performed for air, argon and nitrogen. Moreover, influence of gas flow rate on obtained emission spectrum is discussed