14 research outputs found
A Microelectromechanical Systems-Enabled, Miniature Triple Quadrupole Mass Spectrometer
Hybrid integration of optical and electronic components on silicon
The hybridization of optical, optoelectronic and electronic components on a silicon submount (silicon optohybrid technology) offers an attractive route to high functionality and low-cost modules for a wide variety of applications. The key features of this technology are described with reference to the construction of a six-channel transmitter-receiver array module pair. Recent developments and future prospects are outlined