Monolithic MEMS quadrupole mass spectrometers by deep silicon etching

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Hybrid integration of optical and electronic components on silicon

The hybridization of optical, optoelectronic and electronic components on a silicon submount (silicon optohybrid technology) offers an attractive route to high functionality and low-cost modules for a wide variety of applications. The key features of this technology are described with reference to the construction of a six-channel transmitter-receiver array module pair. Recent developments and future prospects are outlined