Grain shape and size modified by aluminum ions in ultrafine titanium layer

The paper presents TEM investigations of the grain shape and size in the centre of titanium layermodified by aluminum ions depending on their implantation dosage. The average grain size is determined in theboth longitudinal and transverse directions. The grain size distribution plots are constructed in this paper. Investigations show that the grain size decreases with the increase of the ion-implantation dosage. Also, the reduction of the grain anisotropy factor is observed