The surface adhesion parameter: a measure for wafer bondability

A theory is presented which describes the initial direct wafer bonding process. The effect of surface microroughness on the bondability is studied on the basis of the theory of contact and adhesion of elastic solids. An effective bonding energy, the maximum of which is the specific surface energy of adhesion, is proposed to describe the real binding energy of the bonding interface including the influence of the wafer surface microroughness. Both the effective bonding energy and the real area of contact between rough surfaces depend on a dimensionless surface adhesion parameter, &thetas;. Using the adhesion parameter as a measure, three kinds of wafer contact interfaces can be identified with respect to their bondability; viz. the non-bonding regime (&thetas;>&ap;12), the bonding regime (&thetas;<&ap;1), and the adherence regime (1<&thetas;<12). Experimental data are in agreement with this theor

Nanomechanical optical devices fabricated with aligned wafer bonding

This paper reports on a new method for making some types of integrated optical nanomechanical devices. Intensity modulators as well as phase modulators were fabricated using several silicon micromachining techniques, including chemical mechanical polishing and aligned wafer bonding. This new method enables batch fabrication of the nanomechanical optical devices, and enhances their performance

Simulation of anisotropic wet-chemical etching using a physical model

We present a method to describe the orientation dependence of the etch rate of silicon, or any other single crystalline material, in anisotropic etching solutions by analytical functions. The parameters in these functions have a simple physical meaning. Crystals have a small number of atomically smooth faces, which etch (and grow) slowly as a consequence of the removal (or addition) of atoms by rows and layers. However, smooth faces have a roughening transition (well known in statistical physics); at increasing temperature they become rougher, and accordingly the etch and growth rates increase. Consequently, the basic physical parameters of our functions are the roughness of the smooth faces and the velocity of steps on these faces. This small set of parameters describes the etch rate in the two-dimensional space of orientations (on the unit sphere). We have applied our method to the practical case of etch rate functions for silicon crystals in KOH solutions. The maximum deviation between experimental data and simulation using only nine physically meaningful parameters is less than 5% of the maximum etch rate. This method, which in this study is used to describe anisotropic etching of silicon, can easily be adjusted to describe the growth or etching process of any crysta

Silicon micromachined hollow microneedles for transdermal liquid transfer

This paper presents an improved design and fabrication process [ 13 for hollow micro needles with the proper mechanical strength and sharpness to be applied for painless transdermal transfer of liquids. Tests have shown that liquids like blood are drawn into the needle by capillary forces, reducing the need for active pumping. The fabrication method allows different needle shapes like blades and pencils, is robust enough to be applied for largerscale production, and enables the development of a complete micro-TAS for e.g. blood analysis

Highly integrated polymeric microliquid flow controller for droplet microfluidics

Microfluidic applications demand accurate control and measurement of small fluid flows and volumes, and the majority of approaches found in the literature involve materials and fabrication methods not suitable for a monolithic integration of different microcomponents needed to make a complex Lab-on-a-Chip (LoC) system. The present work leads to a design and manufacturing approach for problem-free monolithic integration of components on thermoplastics, allowing the production of excellent quality devices either as stand-alone components or combined in a complex structures. In particular, a polymeric liquid flow controlling system (LFCS) at microscale is presented, which is composed of a pneumatic microvalve and an on-chip microflow sensor. It enables flow regulation between 30 and 230 μl/min with excellent reproducibility and accuracy (error lower than 5%). The device is made of a single Cyclic Olefin Polymer (COP) piece, where the channels and cavities are hot-embossed, sealed with a single COP membrane by solvent bonding and metalized, after sealing, to render a fully functional microfluidic control system that features on-chip flow sensing. In contrast with commercially available flow control systems, the device can be used for high-quality flow modulation in disposable LoC devices, since the microfluidic chip is low cost and replaceable from the external electronic and pneumatic actuators box. Functionality of the LFCS is tested by connecting it to a microfluidic droplet generator, rendering highly stable flow rates and allowing generation of monodisperse droplets over a wide range of flow rates. The results indicate the successful performance of the LFCS with significant improvements over existing LFCS devices, facing the possibility of using the system for biological applications such as generating distinct perfusion modes in cell culture, novel digital microfluidics. Moreover, the integration capabilities and the reproducible fabrication method enable straightforward transition from prototype to product in a way that is lean, cost-effective and with reduced risk

Cellular angiofibroma of the orbit

Cellular angiofibroma is a benign mesenchymal tumor most commonly located in the distal genital tract of both men and women. Although extragenital locations have been reported rarely, this is the first report of cellular angiofibroma of the orbit. A 58-year-old man presented with a mass in the left superomedial orbit since 2 years. Magnetic resonance imaging showed a well-demarcated lesion with a homogeneous intermediate signal intensity on both T1- and T2-weighted images, homogeneous contrast enhancement and high signal intensity on diffusion-weighted images. Complete excision was performed through a medial upper eyelid crease incision. Histopathology showed a vascular CD34-positive and STAT6-negative spindle cell tumor with monoallelic loss of FOXO1, indicating cellular angiofibroma

Silicon-based microreactors as research tools in chemistry

In this contribution suitability of silicon-technology based microreactors for performing research on reactions where temperature control is essential is discussed. The versatility of silicon micromachining technology is elucidated by describing the fabrication and performance of two types of microreactors for studying Rh-catalyzed gas phase reactions. Depending on the design of the microreactor, working temperatures up to 800 degrees C can be obtaine