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8 research outputs found

Dry Etching

Author: AA Howling
FF Chen
FF Chen
FF Chen
FF Chen
H Abe
H Schmidt
HR Han
IP Ganachev
J Schmitt
J-S Park
JY Park
K Komaki
KH Jang
KM Chang
KN Kim
KR Williams
L Latrasse
M Draghici
M Kim
M Moisan
M Pichot
MA Liberman
P Colpo
RW Boswell
S-J Kyung
SJ Jung
SJ Laverty
T Ishijima
T Urisu
Y Setsuhara
Publication venue: 'Springer Science and Business Media LLC'
Publication date: 01/01/2016
Field of study

Online Research Database In Technology

Microwave power coupling in a surface wave excited plasma

Author: Ganachev I. P.
Kousaka H.
Lieberman M. A.
Takaoka Y.
Publication venue: 'AIP Publishing'
Publication date
Field of study

Development and Modeling of a Microwave-Excited Microplasma Thruster

Author: Ganachev I.
Kousaka K.
Kousaka K.
Lieberman M. A.
Mitchner M.
Mueller J.
Publication venue: 'American Institute of Aeronautics and Astronautics (AIAA)'
Publication date
Field of study

On the Parameters of Inductively Coupled and Microwave BF3 Plasmas Used for Plasma Immersion Ion Implantation

Author: Amemiya
Andersen
Annaratone
Averkin
Averkin
Averkin
Bryant
Ershov
Ershov
Ershov
Ershov
Ershov
Ganachev
Godyak
Godyak
Godyak
Hopwood
Hopwood
Ivanov
Kono
Koo
Lagarde
Lieberman
Loewenhardt
Malyshev
Orlikovsky
Orlikovsky
Sugai
Publication venue: 'Wiley'
Publication date
Field of study

Radial-Profile Control of Cylindrical Plasma Source With Multiple Low-Inductance Antenna Units

Author: Collison
Deguchi
Dias
Ganachev
Getty
Gudmundsson
Hopwood
Hopwood
Kim
Kimura
Komachi
Kortshagen
Le Coeur
Matsuo
Moisan
Nagatsu
Popov
Schmitt
Seo
Setsuhara
Setsuhara
Setsuhara
Suzuki
Takahashi
Takenaka
Takenaka
Takenaka
Tsuda
Ventzek
Yasui
Publication venue: 'Wiley'
Publication date
Field of study

Performance Testing of a Miniature Electrothermal Thruster Using Microwave-Excited Microplasmas

Author: Bilgic A. M.
Ganachev I.
Hopwood J.
Iza F.
Micci M. M.
Moisan M.
Sugai H.
Tahara H.
Takao Y.
Takao Y.
Takao Y.
Takao Y.
Terashima K.
Yanagi R.
Yoshiki H.
Publication venue: 'American Institute of Aeronautics and Astronautics (AIAA)'
Publication date
Field of study

Resonance phenomena in microwave nonmagnetized plasma source. Plasmachemical application

Author: Albriton
Aliev
Aliev
Askar'yan
Batanov
Batanov
Batanov
Bulanov
Bulanov
Ganachev
Gritsinin
Gritsinin
I. A. Kossyi
I. M. Taktakishvili
Kossyi
Kovrizhnykh
Letout
Letout
M. Misakyan
Mc Corcle
N. K. Berezhetskaya
Rauchle
Reinking
S. Temchin
Shuaibov
Sugai
Terebessy
Terebessy
V. Kop'ev
Y. D. Lee
Publication venue: 'EDP Sciences'
Publication date
Field of study

Gas-Phase, Bulk Production of Metal Oxide Nanowires and Nanoparticles Using a Microwave Plasma Jet Reactor

Author: Aminzadeh A.
Chen Y.
Conrads H.
Cvelbar U.
Deb B.
Dick K. A.
Fincke J. R.
Ganachev I. P.
Gubbala S.
Huang M. H.
Huang Y.
Jiang X.
Kozan M.
Liao S.-C.
Lippens B. C.
Mozetic M.
Peng H.
Rao R.
Sharma S.
Spurr R. A.
Thangala J.
Vaddiraju S.
Vivekchand S. R. C.
Wan Y. P.
Wang X.
Yao B. D.
Yu T.
Publication venue: 'American Chemical Society (ACS)'
Publication date
Field of study

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