Autofocus in the systems of automatic mask and wafer pattern inspection

Для повышения точности автоматизированного контроля дефектов топологического рисунка фотошаблонов и полупроводниковых пластин предложена система автофокусировки, обеспечивающая удержание поверхности объекта в зоне резкости объектива при последовательном сканировании топологии.In order to increase accuracy of automatic mask and wafer pattern inspection an autofocus system is offered which ensures keeping the plane in objective focus zone during the sequential scanning of the pattern

Space missions for astronomy and astrophysics in Korea: past, present, and future

We review the history of space missions in Korea focusing on the field of astronomy and astrophysics. For each mission, scientific motivation and achievement are reviewed together with some technical details of the program, including mission schedule. This review includes ongoing and currently approved missions, as well as some planned ones. Within the admitted limitations of the authors' perspectives, some comments on the future direction of the space program for astronomy and astrophysics in Korea are made at the end of this review