Design Consideration for the AbsoluteTesting Approach of Aspherics using Combined Diffractive Optical Elements

Aspheric optical surfaces are often tested using diffractive optics as null elements. For precise measurements, the errors caused by the diffractive optical element must be calibrated. Recently, we reported first experimental results of a three position quasi-absolute test for rotationally invariant aspherics by using combined-diffractive optical elements (combo-DOEs). Here we investigate the effects of the DOE substrate errors on the proposed calibration procedure and present a set of criteria for designing an optimized combo-DOE. It is demonstrated that this optimized design enhances the overall consistency of the procedure. Furthermore, the rotationally varying part of the surface deviations is compared with the rotationally varying deviations obtained by an N-position averaging procedure and is found to be in good agreement