7 research outputs found

    Adaptive Charting Techniques: Literature Review and Extensions

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    The continuous development of SPC is driven by challenges arising from practical applications across diverse industries. Among others, adaptive charts are becoming more and more popular due to their capability in tackling these challenges by learning unknown shifts and tracking time-varying patterns. This chapter reviews recent development of adaptive charts and classifies them into two categories: those with variable sampling parameters and those with variable design parameters. This review focuses on the latter group and compares their charting performance. As an extension to conventional multivariate charts, this work proposes a double-sided directionally variant chart. The proposed chart is capable of detecting shifts having the same or opposite directions as the reference vector and is more robust to processes with unpredictable shift directions

    Fault Detection for a Via Etch Process Using Adaptive Multivariate Methods

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    Charge sensitive fluid sensor for chemical and biological applications

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    A new field-effect transistor based transducer concept is presented, for measuring both, liquid and gaseous media. It uses a Faraday cup with a floating electrode inside, which is connected to the gate of a MOS like transistor. The SOI based technological realization allows a new degree of freedom for more flexible measurements as compared to conventional FET based transducers. Potentiometric measurements are presented. Additionally the SOI technology allows simple packaging

    New process flow for combined three layer and self aligned contacts

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