Fabrication of Surface Micromachined AlN Piezoelectric Microstructures and its Potential Apllication to RF Resonators

We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive sputtering. The top Cr layer is used both as a mask to etch the AlN thin films and as an electrode to actuate the AlN piezoelectric layer. The AlN layer is patterned anisotropically by wet etching using a TMAH (25%) solution. This multilayer stack uses silicon-di-oxide as a sacrificial layer to make free-standing structures. One-port scattering paramenter measurement using a network analyzer show a resonant frequency of 1.781 GHz on a clamped-clamped beam suspended structure. The effective electromechanical coupling factor is calculated as 2.4 % and the measured bandwidth is 13.5 MHz for one such a doubly clamped beam (990x30) μm2

Optimization of Cricket-inspired, Biomimetic Artificial Hair Sensors for Flow Sensing

High density arrays of artificial hair sensors, biomimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing

Design and fabrication of 1xN and NxN planar waveguide couplers for multimode fiber-based local area networks.

We report on the design and fabrication of compact and potentially low-cost multimode fiber matched 1 x N and N x N couplers for LAN’s. The design utilizes the self-imaging effect and tapering of the Multi-Mode Interference (MMI) section. An extended mode propagation analysis and 3-D beam propagation method (BPM) were used to analyze and design these structures. The simulations show that the couplers exhibit low excess losses, low power imbalance, and relaxed fabrication tolerances at very short device length. The devices were fabricated in polymer waveguide technology using spin coating, photolithography, and reactive ion etching. Preliminary experimental results show promising characteristics

Optimized biomimetic hair sensor arrays for sensing oscillating air flows

Artificial hair sensor arrays are bio-inspired from flow-sensitive filiform hairs of the crickets, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize higher sensitivities compared to our previous sensor arrays by means of model-based design optimizations and fabricated with advanced MEMS technologies. The artificial hair-sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s surpassing noise levels even at 1 kHz operational bandwidths

Compact polymer components for an integrated add-drop multiplexer

A phasar and a digital thermo optic switch have been designed and processed in a high index contrast polymer technology. Both devices are small enough to fabricate two integrated add-drop multiplexers on one 4 inch wafe

Algorithms and literate programs for weighted low-rank approximation with missing data

Linear models identification from data with missing values is posed as a weighted low-rank approximation problem with weights related to the missing values equal to zero. Alternating projections and variable projections methods for solving the resulting problem are outlined and implemented in a literate programming style, using Matlab/Octave's scripting language. The methods are evaluated on synthetic data and real data from the MovieLens data sets

All-optical switching in lithium niobate directional couplers with cascaded nonlinearity

We report on intensity-dependent switching in lithium niobate directional couplers. Large nonlinear phase shifts that are due to cascading detune the coupling between the coupler branches, which makes all-optical switching possible. Depending on the input intensity, the output could be switched between the cross and the bar coupler branches with a switching ratio of 1:5 and a throughput of 80%