Recent Development: Single Contact Optical Beam Induced Currents (SCOBIC) – Technique and Applications

Abstract Single contact optical beam induced currents (SCOBIC) is a variation on the OBIC failure analysis technique that requires only one point of contact with the junction being examined. This article discusses the basic principles of this new method and how it compares with OBIC in terms of measurement performance. It also presents examples showing how SCOBIC can be used to analyze CMOS devices from the front and back side without need for complex FIB and microprobing procedures.</jats:p

Application of Single Contact Optical Beam Induced Currents (SCOBIC) for Backside Failure Analysis

Conference Proceedings from the International Symposium for Testing and Failure Analysis17-2