Exploring the temporally resolved electron density evolution in EUV induced plasmas

We measured for the first time the electron density in an Extreme Ultra-Violet induced plasma. This is achieved in a low-pressure argon plasma by using a method called microwave cavity resonance spectroscopy. The measured electron density just after the EUV pulse is $2.6\cdot10^{16}$ m$^{-3}$. This is in good agreement with a theoretical prediction from photo ionization, which yields a density of $4.5\cdot10^{16}$ m$^{-3}$. After the EUV pulse the density slightly increase due to electron impact ionization. The plasma (i.e. electron density) decays in tens of microseconds.Comment: 3 pages, 4 figure

In situ infrared absorption spectroscopy of dusty plasmas

International audienceIn situ, time-resolved Fourier transform infrared spectroscopy was used to study particulate formation in rf discharges in mixtures of silane, argon, and nitrogen. The spectra were taken at a maximum rate of 20 Hz. The discharge conditions were chosen such that previous calibrations of the time evolutions of particle size and density could be used. The measurements indicate that the onset of the solid-state vibrational absorptions of the SiH and SiH 2 bands only takes place after the nucleation and coagulation phase have finished; it coincides with the previously predicted start of the deposition of amorphous hydrogenated silicon on the particles. The dissociation of the silane feed gas is found to be in the range of 30%, and its time development suggests that also the large-scale dissociation of silane only starts after the coagulation phase. This is in agreement with previously observed trends for the electron temperature. If silicon partilces are grown in the plasma, and the silane flow is stopped, the Si particles stay trapped in the glow. The infrared measurements, however, show that they almost completely oxidize: the SiH/SiH 2 vibrations disappear and a strong SiO vibration appears. If nitrogen gas is allowed into the plasma, the SiO vibration is replaced by a SiN vibration

Transport of argon ions in an inductively coupled high-density plasma reactor

The first direct observation of the velocity distribution of the metastable Ar1*~2G9/2! ions in the presheath of an inductively coupled plasma has been achieved by using the Doppler shifted laser induced fluorescence technique. Drift of the ions along the electric field in the presheath is observed and distribution functions of the velocity in both parallel and perpendicular directions, relative to the E field, are deduced at 5 and 40 mTorr. Present results show that in high density plasmas the velocity distribution of the metastable ions is directly related to that of the ground state argon ions. Neutral gas temperature of around 600 K is also measured from the absorption profile of a diode laser beam, set on one of the 772.4 nm argon lines