Determination of the electron temperature by optical emission spectroscopy in a 13.56 MHz dusty methane plasma: Influence of the power

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Particle Collecting in a 13.56 MHz Radiofrequency Methane Discharge

Fig. 1: Particle trapping near the electrodes in RF methane plasma (RF = 80W, pressure 130 Pa and flow rate 5.6 sccm) put in evidence by laser light scattering: (a) under the RF electrode 200 s after the plasma is switched on, (b) above the grounded electrode 300 s after the plasma is switched on. The particle cloud form follows the electrical field lines. The authors are with the GREMI, Groupe de Recherches sur l'Energétique des Milieux Ionisés, UMR6606, CNRS/Université d'Orléans, Faculté de

Influence of the particle formation and behavior on the electrical parameters in low pressure radio-frequency CH4/N2 discharges

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Influence of the power on the particles generated in a low pressure radio-frequency nitrogen -rich methane discharge

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Influence of the particle formation and behavior on the electrical parameters in the low pressure radio frequency discharge.

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Particles generated in a low pressure radio frequency nitrogen-rich methane discharge

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Luminescence properties and structure of hydrogen amorphous carbon nitrile particles obtained in CH4/N2 RF plasmas

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Analyse par Spectroscopie infrarouge des particules carbonées contenues dans une décharge R.F. basse pression de méthane azote

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Photoluminescence of hydrogen amorphous carbon nitrile particles obtained in a 13.56 MHz dusty plasma

International audienceIn this article, we report the photoluminescence (PL) of small particles generated in CH4/N2 radiofrequency (13.56 MHz) discharges. The particles have been produced with various mixtures of N2 and CH4 gases. The particle PL has been analysed using fluorescence microscopy in air with an Ar+ laser at 488 nm. It appears that the photoluminescence intensity is in relation to the particle size. However, the incorporation of nitrogen modifies the peak position of the PL spectrum