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2 research outputs found
プラズマ化学気相成長法により堆積したas-grownシリコン酸窒化薄膜の膜中欠陥に関する研究
Author
Futatsudera Masatomo
二ツ寺 政友
Publication venue
金沢大学
Publication date
01/01/2006
Field of study
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取得学位:博士(工学),学位授与番号:博甲第708号,学位授与年月日:平成17年3月22
Kanazawa University Repository for Academic Resources
プラズマ化学気相成長法により堆積したas-grownシリコン酸窒化薄膜の膜中欠陥に関する研究
Author
Futatsudera Masatomo
二ツ寺 政友
Publication venue
金沢大学
Publication date
05/10/2017
Field of study
No full text
Institutional Repositories DataBase (IRDB)