309 research outputs found
The Multipole Resonance Probe: Simultaneous Determination of Electron Density and Electron Temperature Using Spectral Kinetic Simulation
The investigation of the spectral kinetic model of the Multipole Resonance
Probe (MRP) is presented and discussed in this paper. The MRP is a
radio-frequency driven probe of the particular spherical design, which is
suitable for the supervision and control of low-temperature plasma. The
importance of the kinetic effects was introduced in the previous study of the
spectral kinetic model of the idealized MRP. Such effects particularly dominate
the energy loss in a low-pressure regime. Unfortunately, they are absent in the
Drude model. With the help of the spectral kinetic scheme, those energy losses
can be predicted, and it enables us to obtain the electron temperature from the
FWHM in the simulated resonance curve. Simultaneously, the electron density can
be derived from the simulated resonance frequency. Good agreements in the
comparison between the simulation and the measurement demonstrate the
suitability of the presented model
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