MIBIOMED - Herstellung von Mikrosystemen zur Untersuchung von biologischen Zellen Abschlussbericht

According to the specifications from the partners ISIT realized specific chip microstructures for the investigation and electromanipulation of living biological cells. Different planar microelectrode structures have been realized with single and double metal processes on silicon or glass wafers. The line width was from 0.1 #mu#m to about 10 #mu#m. A second topic was on the fabrication of thin silicon membranes with microholes and microelectrodes. It was demanded that all materials in contact with the cells have to be biocompatible. For testing the biocompatibility ISIT delivered mono-silicon, poly-silicon, silicon dioxide, Cr/Ti, Ti/Pt and different photoresist samples. In addition chips with different topographies to investigate the growth of adherent cells on structured surfaces have been produced. The structure height varied from 2 #mu#m to about 50 #mu#m. (orig.)SIGLEAvailable from TIB Hannover: DtF QN1(73,54) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Neuartige miniaturisierte Biosensoren fuer die Umweltkontrolle. Teilprojekt A: Elektrochemische Chip-Immunosensoren Abschlussbericht

A novel electrochemical immunosensor, consisting of interdigitated array electrodes fabricated in silicon technology, a multichannel potentiostat, an miniaturized flow through system, were developed as prototypes and have been tested in cooperation with a university partner. The immunosensor based on the displacement of low molecular weight species (haptens), labeled with one to three electrochemical redox mediators enable highly sensitive measurement of the haptens by means of redox recycling and multichannel detection. The redox recycling was carried out with interdigitated electrodes with typical geometries of 0,8 #mu#m-4 #mu#m. A miniaturized multichannel potentiostat was developed for simultaneously measurement of redox recycling on six independent working. The enhanced sensitivity of the immunodetector was 1 nmol/l summarizing all amplification steps of a cascade. The function of the immunosensing system was demonstrated for a nitrophenol derivate pollution in different concentrations. (orig.)Available from TIB Hannover: F97B1147+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Chemisch-mechanisches Polieren von Si-Wafern Abschlussbericht

Goal of the project was the construction, the build and the testing of a polisher for planarisation during the manufacturing of advanced integrated circuits (ICs). Together with the polishing tool manufacturer Peter Wolters Werkzeugmaschinen GmbH, Rendsburg, Germany, a new cluster tool for chemical-mechanical polishing with subsequent post-CMP cleaning including an in-line thickness measurement tool has been developed. After the thorough testing of the prototype emphasis was laid in the development of processes for polishing SiO_2 layers and in the development of suitable brush cleaning processes. The performed work included the search for an optimised set of polishing parameters as well as the characterisation of polishing processes with respect to removal rate, non-uniformity, reproducibility (baseline), planarisation etc. After adjustments at the polisher prototype like improvement of chuck construction or optimisation of back side pressure, it could be demonstrated that the polishing results are comparable to the results of the CMP tool market leader in the US. Beside 150 mm wafers polishing of 200 mm wafers have been performed as well as the haze-free polishing step needed for prime wafer manufacturing. Celaning processes have been optimised by means of particle and metal contamination measurements. The results could be improved by controlled addition of small amounts of ammonium hydroxide and citric acid. In order to improve process control tests for an in-line thickness measurement have been performed. (orig.)Available from TIB Hannover: F97B2076+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Optimierte Integration fuer Hochfrequenzsysteme Abschlussbericht

Available from TIB Hannover: F00B1163 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Mikro-Encoder mit zentrischer optischer Abtastung (CENTRO). Teilvorhaben: Aufbau, Verarbeitung und Zuverlaessigkeit des Opto-IC-Bauteils Abschlussbericht

SIGLEAvailable from TIB Hannover: F04B635 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung (BMBF), Bonn (Germany)DEGerman

Untersuchung der Moeglichkeiten einer Miniaturisierung der Pneumatik Abschlussbericht

SIGLEAvailable from TIB Hannover: F98B1694 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDeutsche Forschungsgemeinschaft (DFG), Bonn (Germany)DEGerman

8 Zoll Epi-Wafer fuer PowerMOS Schaltkreise (POSI) Abschlussbericht

SIGLEAvailable from TIB Hannover: F01B1338+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Entwicklung eines mit der Siliziumtechnologie hergestellten pneumatischen 3/2-Wege-Mikroventils Abschlussbericht

SIGLEAvailable from TIB Hannover: F04B842 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung, Berlin (Germany)DEGerman

Optimierte Integration fuer Hochfrequenzsysteme Abschlussbericht

Available from TIB Hannover: F00B1165 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung und Forschung, Berlin (Germany); DLR Deutsches Zentrum fuer Luft- und Raumfahrt e.V., Bonn (Germany)DEGerman

Automatisierter Strassenverkehr. Teilvorhaben: Kolonnenfahrt und Durchsatzoptimierung im Strassenverkehr (Elektronisches Auge - AVDB). Phase 1 Abschlussbericht

Available from TIB Hannover: F98B1971+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman