Investigation of a linear variable optical filter (LVOF) manufacturing process

This paper reports on fabrication process for Linear Variable Optical Filters (LVOF). This LVOF can be fabricated in a resist layer by just one lithography step. The profile of resist structure is subsequently transferred into quartz substrate by plasma etching. Complete LVOF fabrication involves deposition of a lower dielectric mirror using a stack of dielectrics on the substrate, tapered layer formation and deposition of the top dielectric mirror [1]. Shown possibility of LVOF using in experimental hyperspectral setups

Modelling and manufacture of an interference filter for narrow spectral selection

We made and investigated narrow spectral selection filter. The influence of the multilayer structure properties and parameters on the spectral characteristics of the optical filter was investigated. The possibility of applying such a filter for selecting a narrow range of wavelengths that can find various applications in the field of information transfer and medical devices was shown.This work was supported by the Federal Agency of Scientific Organizations (agreement No 007-ГЗ/ Ч3363/26) and Ministry of Education and Science and Russian Foundation for Basic Research grant No. 16-29-11744

Modeling of a multilayer dielectric stack Notch filter for visible spectrum

In this work, a multilayer dielectric optical notch filters design for visible spectrum 450-700 nm is proposed based on TiO2 and SiO2 alternating layers. Titanium dioxide (TiO2) is selected for its high refractive index value (2.5) and Silicon dioxide (SiO2) as a low refractive index layer (1.45). These filters are conventionally anticipated for overpowering of powerful laser beams in research experiments, to obtain good signal-to-noise ratios in Raman laser spectroscopy. The designed filter shows a high quality with average transmission of more than 90% in 450-535 and 587-700 nm wavelength ranges. And a stop band region between 536-586 nm with a FWHM of 50 nm shows a transmission of 3% with an optical density of greater than 3, which makes it a promising element to be used as notch filter.This work was supported by the Ministry of Education and Science of the Russian Federation and the Russian Foundation for Basic Research (grant No. 16-47-630546)

Thermal effect on the optical and morphological properties of TiO2 thin films obtained by annealing Ti metal layer

Titanium metal layers of different thicknesses were deposited on optical glass, quartz and ceramic substrates at 50°C and 150°C substrate temperature with the help of magnetron deposition. Metal layers were converted into rutile phase of TiO2 at different annealing temperatures. The effect of thermal annealing on the morphology and refractive index of the thin film was investigated

Analytical modeling of synchronous demodulation of a multi-DOF gyro-accelerometer

This paper reports a analytical model of a 4-DOF gyro-accelerometer consisting of 2-DOF drive and 2-DOF sense oscillators configured orthogonally. A detection scheme for time varying angular rate and linear acceleration, by combining the structural-model of gyro-accelerometer with the processes of synchronous demodulation and filtration, has also been spelt out to investigate frequency responses at the event of angular motion and linear acceleration. Finally, the results of the model have been validated by comparing with MATLAB®/Simulink data which shows excellent matching with each other

Design and simulation of a SOI based mems differential accelerometer

In this paper, the design and analysis of a differential MEMS capacitive accelerometer is presented. The device is designed to be compatible for SOI based fabrication process. The outstanding mechanical and electrical properties of silicon on insulator (SOI) wafers make it popular for high-performance MEMS sensors such as accelerometers. The operating range of the designed device is 0-10g with its sense axis in the in-plane direction. The movable comb fingers attached to the proof mass form capacitors with the fixed electrode fingers. The movable and fixed fingers are spaced with unequal gaps to form the differential capacitive sensing configuration. The base capacitance of this configuration is about 0.77pF and the sensitivity in response to acceleration input is about 0.776 fF/g. The resonance frequency of the structure in the sensing mode is found to be 7.138 kHz.The work was partially funded by the Russian Federation Ministry of Education and Science

Design, simulation and fabrication process of a SOI based 2-DOF vibratory gyroscope

This paper reports the design, simulation and fabrication process for a 2-DOF decoupled vibratory gyroscope. The structure is deliberately designed to have decoupled drive and sense mode oscillation to prevent unstable operation due to mechanical coupling, resulting in low zero rate out-put drift. At the same time, the closer the drive and sense resonances are, the higher is the angular rate resolution of the gyroscope. This can be achieved by using symmetric suspensions, but it results in reduced bandwidth. The proposed design has been configured to achieve about 150 Hz bandwidth, while ensuring decoupled operation of the drive and sense modes. Fem analysis has been carried out in CoventorWare® MEMS DESIGN software and simulation results show that the drive resonance occurs at 21.48 kHz and sense resonance at 21.63 kHz. The structure is designed for 15 µm this device layer. Fabrication of the design is proposed using DRIE and sacrificial release etching on SOI wafer. DRIE etching with high aspect ratio has been successfully carried out as desired and the results have been presented