Four field coupled dynamics for a micro resonant gas sensor

In a micro resonant gas sensor, the electrostatic excitation is used widely. For a micro resonant gas sensor with electrostatic excitation, four physical fields are involved. In this paper, for the micro resonant gas sensor, the four-field coupled dynamics equation is proposed. It includes mechanical force field, chemical density field, electrostatic force field, and the van der Waals force field. Using the method of multiple scales, the coupled dynamics equation is resolved. The effects of the four physical fields on the natural frequencies for the micro resonant gas sensor are investigated. Results show that the effects of the Van der Waals force on the natural frequencies of the micro resonant gas sensor depend on the mechanical parameters and the bias voltages; the sensitivity of the natural frequencies to the gas adsorption depends on the mechanical parameters, the bias voltages, and the Van der Waals force

Four field coupled dynamics for a micro resonant gas sensor

In a micro resonant gas sensor, the electrostatic excitation is used widely. For a micro resonant gas sensor with electrostatic excitation, four physical fields are involved. In this paper, for the micro resonant gas sensor, the four-field coupled dynamics equation is proposed. It includes mechanical force field, chemical density field, electrostatic force field, and the van der Waals force field. Using the method of multiple scales, the coupled dynamics equation is resolved. The effects of the four physical fields on the natural frequencies for the micro resonant gas sensor are investigated. Results show that the effects of the Van der Waals force on the natural frequencies of the micro resonant gas sensor depend on the mechanical parameters and the bias voltages; the sensitivity of the natural frequencies to the gas adsorption depends on the mechanical parameters, the bias voltages, and the Van der Waals force

Four field coupled dynamics for a micro resonant gas sensor

In a micro resonant gas sensor, the electrostatic excitation is used widely. For a micro resonant gas sensor with electrostatic excitation, four physical fields are involved. In this paper, for the micro resonant gas sensor, the four-field coupled dynamics equation is proposed. It includes mechanical force field, chemical density field, electrostatic force field, and the van der Waals force field. Using the method of multiple scales, the coupled dynamics equation is resolved. The effects of the four physical fields on the natural frequencies for the micro resonant gas sensor are investigated. Results show that the effects of the Van der Waals force on the natural frequencies of the micro resonant gas sensor depend on the mechanical parameters and the bias voltages; the sensitivity of the natural frequencies to the gas adsorption depends on the mechanical parameters, the bias voltages, and the Van der Waals force