Lasergestuetztes Sensorsystem zur Online-Prozesskontrolle fuer das US-Bonden von Mikrosystemen (LASOP-MST) Abschlussbericht

The project served the further development of standard deformation control during ultrasonic wirebonding. The innovative aspect of the project is the implementation of laser-optical vibration measurement in the first phase of interconnection (cleaning phase). In this context it was proven that an interferometric measurement system can be successfully applied for the online recording of vibration amplitude at automatic bonding systems (rotating head). Simultaneously, a functional dependence between interconnection quality and vibration kinetics was observed. These relations were transferred into a new online quality control system, leading to an increase in process stability and bond quality. (orig.)Available from TIB Hannover: F00B1304+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung und Forschung (BMBF), Bonn (Germany)DEGerman

Industrieller Einsatz von Verbindungstechniken fuer Mikro-/Millimeterwellenkomponenten (MikroMilli). Industrielle Produktion von Mini- und hochintegrierten Endoskopen (MEP) Gemeinsamer Abschlussbericht. Verbundprojekte 1995-1999

Increasing precision requirements and larger quantities necessitate, apart from the further development of the micro assembly technology, the development of innovative equipment technology for the automated production of micro-technical products. Due to results of the MikroMilli project decisive improvements were achieved concerning the industrializing of sub-assemblies of the high-frequency technique and were converted into concrete production concepts. This has been achieved with new equipment-concepts through which submillimetre-sized components of the high-frequency technique can be assembled and connected automatically with micrometre-exact precision for the first time. Also, the findings flow directly into innovative products where a micrometre-exact manufacturing technology is decisive. A good starting basis for the future production of precision-optic systems has been created with results of the MEP project, a production concept adapted to the market demands, as well as equipment technical solutions for the magazining system, component identification, cleaning, inspection and automated assembly. The developments of the two projects advance the industrial realization of micro-technial products and thus make an important contribution for driving the microsystem technology forward in Germany. (orig.)SIGLEAvailable from TIB Hannover: RR 3532(67)+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung (BMBF), Bonn (Germany)DEGerman