Strong 4-mode coupling of nanomechanical string resonators

We investigate mechanical mode coupling between the four fundamental flexural modes of two doubly-clamped, high-Q silicon-nitride nanomechanical string resonators. Strong mechanical coupling between the strings is induced by the strain mediated via a shared clamping point, engineered to increase the exchange of oscillatory energy. One of the resonators is controlled dielectrically, which results in strong coupling between its out-of-plane and in-plane flexural modes. We show both, inter-string out-of-plane-in-plane and 3-mode resonance of the four coupled fundamental vibrational modes of a resonator pair, giving rise to a simple and a multimode avoided crossing, respectively.Comment: 5 pages, 4 figure

Damping of metallized bilayer nanomechanical resonators at room temperature

We investigate the influence of gold thin-films subsequently deposited on a set of initially bare, doubly clamped, high-stress silicon nitride string resonators at room temperature. Analytical expressions for resonance frequency, quality factor and damping for both in- and out-of-plane flexural modes of the bilayer system are derived, which allows for the determination of effective elastic parameters of the composite structure from our experimental data. We find the inverse quality factor to scale linearly with the gold film thickness, indicating that the overall damping is governed by losses in the metal. Correspondingly, the mechanical linewidth increases by more than one order of magnitude compared to the bare silicon nitride string resonator. Furthermore, we extract mechanical quality factors of the gold film for both flexural modes and show that they can be enhanced by complete deposition of the metal in a single step, suggesting that surface and interface losses play a vital role in metal thin-films

Exploiting the nonlinear impact dynamics of a single-electron shuttle for highly regular current transport

The nanomechanical single-electron shuttle is a resonant system in which a suspended metallic island oscillates between and impacts at two electrodes. This setup holds promise for one-by-one electron transport and the establishment of an absolute current standard. While the charge transported per oscillation by the nanoscale island will be quantized in the Coulomb blockade regime, the frequency of such a shuttle depends sensitively on many parameters, leading to drift and noise. Instead of considering the nonlinearities introduced by the impact events as a nuisance, here we propose to exploit the resulting nonlinear dynamics to realize a highly precise oscillation frequency via synchronization of the shuttle self-oscillations to an external signal.Comment: 5 pages, 4 figure

Finite time St\"uckelberg interferometry with nanomechanical modes

St\"uckelberg interferometry describes the interference of two strongly coupled modes during a double passage through an avoided energy level crossing. In this work, we experimentally investigate finite time effects in St\"uckelberg interference and provide an exact analytical solution of the St\"uckelberg problem. Approximating this solution in distinct limits reveals uncharted parameter regimes of St\"uckelberg interferometry. Experimentally, we study these regimes using a purely classical, strongly coupled nanomechanical two-mode system of high quality factor. The classical two-mode system consists of the in-plane and out-of-plane fundamental flexural mode of a high stress silicon nitride string resonator, coupled via electric gradient fields. The dielectric control and microwave cavity enhanced universal transduction of the nanoelectromechanical system allows for the experimental access to all theoretically predicted St\"uckelberg parameter regimes. We exploit our experimental and theoretical findings by studying the onset of St\"uckelberg interference in dependence of the characteristic system control parameters and obtain characteristic excitation oscillations between the two modes even without the explicit need of traversing the avoided crossing. The presented theory is not limited to classical mechanical two-mode systems but can be applied to every strongly coupled (quantum) two-level system, for example a spin-1/2 system or superconducting qubit

Microwave cavity-enhanced transduction for plug and play nanomechanics at room temperature

Nanomechanical resonators with increasingly high quality factors are enabled following recent insights into energy storage and loss mechanisms in nanoelectromechanical systems (NEMS). Consequently, efficient, non-dissipative transduction schemes are required to avoid the dominating influence of coupling losses. We present an integrated NEMS transducer based on a microwave cavity dielectrically coupled to an array of doubly-clamped pre-stressed silicon nitride beam resonators. This cavity-enhanced detection scheme allows resolving the resonators' Brownian motion at room temperature while preserving their high mechanical quality factor of 290,000 at 6.6 MHz. Furthermore, our approach constitutes an "opto"mechanical system in which backaction effects of the microwave field are employed to alter the effective damping of the resonators. In particular, cavity-pumped self-oscillation yields a linewidth of only 5 Hz. Thereby, an adjustement-free, all-integrated and self-driven nanoelectromechanical resonator array interfaced by just two microwave connectors is realised, potentially useful for applications in sensing and signal processing

Coherent control of a nanomechanical two-level system

The Bloch sphere is a generic picture describing a coupled two-level system and the coherent dynamics of its superposition states under control of electromagnetic fields. It is commonly employed to visualise a broad variety of phenomena ranging from spin ensembles and atoms to quantum dots and superconducting circuits. The underlying Bloch equations describe the state evolution of the two-level system and allow characterising both energy and phase relaxation processes in a simple yet powerful manner. Here we demonstrate the realisation of a nanomechanical two-level system which is driven by radio frequency signals. It allows to extend the above Bloch sphere formalism to nanoelectromechanical systems. Our realisation is based on the two orthogonal fundamental flexural modes of a high quality factor nanostring resonator which are strongly coupled by a dielectric gradient field. Full Bloch sphere control is demonstrated via Rabi, Ramsey and Hahn echo experiments. This allows manipulating the classical superposition state of the coupled modes in amplitude and phase and enables deep insight into the decoherence mechanisms of nanomechanical systems. We have determined the energy relaxation time T1 and phase relaxation times T2 and T2*, and find them all to be equal. This not only indicates that energy relaxation is the dominating source of decoherence, but also demonstrates that reversible dephasing processes are negligible in such collective mechanical modes. We thus conclude that not only T1 but also T2 can be increased by engineering larger mechanical quality factors. After a series of ground-breaking experiments on ground state cooling and non-classical signatures of nanomechanical resonators in recent years, this is of particular interest in the context of quantum information processing

Signatures of two-level defects in the temperature-dependent damping of nanomechanical silicon nitride resonators

The damping rates of high quality factor nanomechanical resonators are well beyond intrinsic limits. Here, we explore the underlying microscopic loss mechanisms by investigating the temperature-dependent damping of the fundamental and third harmonic transverse flexural mode of a doubly clamped silicon nitride string. It exhibits characteristic maxima reminiscent of two-level defects typical for amorphous materials. Coupling to those defects relaxes the momentum selection rules, allowing energy transfer from discrete long wavelength resonator modes to the high frequency phonon environment

Thermoelastic Damping in MEMS Gyroscopes at High Frequencies

Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high frequencies. The sensitivity of the sensor to such external loads depends strongly on the damping, or rather quality factor, of the high frequency mechanical modes of the structure. In this paper, we investigate the influence of thermoelastic damping on several high frequency modes by comparing finite element simulations with measurements of the quality factor in an application-relevant temperature range. We measure the quality factors over different temperatures in vacuum, to extract the relevant thermoelastic material parameters of the polycrystalline MEMS device. Our simulation results show a good agreement with the measured quantities, therefore proving the applicability of our method for predictive purposes in the MEMS design process. Overall, we are able to uniquely identify the thermoelastic effects and show their significance for the damping of the high frequency modes of an industrial MEMS gyroscope. Our approach is generic and therefore easily applicable to any mechanical structure with many possible applications in nano- and micromechanical systems